Pulsed laser deposition of thin films.

被引:1
|
作者
Zherikhin, AN [1 ]
机构
[1] RAN, Sci Res Ctr Technol Lasers, NICTL RAN, Troitsk 142092, Moscow Reg, Russia
关键词
D O I
10.1117/12.347662
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The experimental results on deposition of superconducting, semicoducting, quantum size and magnetic films by pulsed laser deposition technique are presented. The possible applications of pulsed laser deposition technique are discussed.
引用
收藏
页码:72 / 79
页数:8
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