Silicon comb-drive actuators for low-temperature tuning of superconducting microwave circuits

被引：7
|
作者：
Prest, M. J. [1 ]
Wang, Y. [1 ]
Huang, F. [1 ]
Lancaster, M. J. [1 ]
机构：
[1] Univ Birmingham, Birmingham B15 2TT, W Midlands, England
来源：
JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2008年 / 18卷 / 12期
基金：
英国工程与自然科学研究理事会;
关键词：
D O I：
10.1088/0960-1317/18/12/125003
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Tuning of a superconducting microwave resonator, operating at 77 K, is demonstrated using a silicon micro-machined comb-drive actuator. Thermal expansion coefficient differences between the silicon actuator and the MgO substrate are accommodated by the use of stress absorbing springs. A tuning range of 4.6% is demonstrated for a superconducting microwave resonator with a frequency just below 6 GHz.
引用
收藏
页数：7
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