Silicon comb-drive actuators for low-temperature tuning of superconducting microwave circuits

被引：7

作者：

Prest, M. J. ^{[1
]}

Wang, Y. ^{[1
]}

Huang, F. ^{[1
]}

Lancaster, M. J. ^{[1
]}

机构：

[1] Univ Birmingham, Birmingham B15 2TT, W Midlands, England

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2008年 / 18卷 / 12期

基金：

英国工程与自然科学研究理事会;

关键词：

D O I：

10.1088/0960-1317/18/12/125003

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Tuning of a superconducting microwave resonator, operating at 77 K, is demonstrated using a silicon micro-machined comb-drive actuator. Thermal expansion coefficient differences between the silicon actuator and the MgO substrate are accommodated by the use of stress absorbing springs. A tuning range of 4.6% is demonstrated for a superconducting microwave resonator with a frequency just below 6 GHz.

引用

页数：7

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