Dynamic Behavior of MEMS Variable Capacitor for Autonomous Biometric Sensors

被引：0

作者：

Blum, Kirill E. ^{[1
]}

Ostertak, Dmitriy I. ^{[2
]}

机构：

[1] SibIS LLC, Novosibirsk, Russia

[2] Novosibirsk State Tech Univ, Novosibirsk, Russia

来源：

2016 17TH INTERNATIONAL CONFERENCE OF YOUNG SPECIALISTS ON MICRO/NANOTECHNOLOGIES AND ELECTRON DEVICES (EDM) | 2016年

关键词：

human motion; health monitoring; energy harvesting; electrostatic vibration energy harvester; MEMS variable capacitor;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The influence of spring element profile obtained by deep reactive ion etching on dynamic behavior of MEMS variable capacitor for electrostatic vibration energy harvester is studied. It is found that the vibration resonance frequency of the capacitor movable electrode is decreased with increasing the side subetching angle, whereas the vibration amplitude is increased with increasing this angle. A slight out-of plane swinging of inertial mass is also observed for all three structures caused by the non-uniform compression and tension of the spring elements, the greater swinging was observed for subetched structures.

引用

页码：642 / 645

页数：4

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