Multi-gas detection using Fabry-Perot interferometers on silicon chip

被引：11

作者：

Guertin, Regis ^{[1
]}

Bianki, Marc-Antoine ^{[1
]}

Lemieux-Leduc, Cedric ^{[1
]}

Peter, Yves-Alain ^{[1
]}

机构：

[1] Polytech Montreal, Dept Engn Phys, Montreal, PQ, Canada

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2021年 / 335卷

关键词：

Gas sensing; Fabry-Perot; Polymer; Non-specific detection; DESIGN; ARRAY;

D O I：

10.1016/j.snb.2021.129655

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

This work presents an all optical on chip integrated gas sensor array for sensing multiple gas simultaneously using non-specific polymers as the sensing material. The individual sensors are vertically etched into silicon. They are made of two Bragg mirrors forming a Fabry-Perot cavity which is functionalized with different polymers such as polyethylene glycol (PEG), SU-8 and polydimethylsiloxane (PDMS). Multi-gas detection was achieved for various gas mixtures of isopropyl alcohol (IPA), H2O, valeric acid and butanol. Using a linear model, we report limits of detection as low as 8.1 parts per million (ppm) for valeric acid within mixtures.

引用

页数：5

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