Laser profilometer using a Fabry-Perot etalon and an objective

被引：2

作者：

Lin, Shyh-Tsong ^{[1
]}

Yeh, Sheng-Lih ^{[2
]}

Wang, Yi-Chun ^{[3
]}

Chen, Meng-Zhu ^{[1
]}

机构：

[1] Natl Taipei Univ Technol, Dept Electroopt Engn, Taipei 10608, Taiwan

[2] Lunghwa Univ Sci & Technol, Dept Mech Engn, Lunghwa, Taiwan

[3] Wu Feng Agr & Ind Vocat High Sch, Dept Elect Tech, Taipei, Taiwan

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2013年 / 203卷

关键词：

Laser profilometer; Fabry-Perot etalon; Objective; OPTICAL COHERENCE TOMOGRAPHY; INTERFERENCE MICROSCOPES; NUMERICAL APERTURE; CALIBRATION; MIRAU;

D O I：

10.1016/j.sna.2013.08.001

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper introduces an innovative laser profilometer using a Fabry-Perot etalon and an objective. Following the derivation of the measurement theory, an experimental setup constructed to realize the profilometer is demonstrated, and the experimental results from the uses of this setup are then presented. The experimental setup has a sensitivity, vertical resolution, and stability of 1.62/mu m, 2.2 nm, and 6.6 nm, respectively, and the experimental results agree not only the validity but also the feasibility of the proposed profilometer. (C) 2013 Elsevier B.V. All rights reserved.

引用

页码：47 / 51

页数：5

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