Consideration of Secondary Electron Emission Effect for Probe Measurement

被引：3
|
作者：
Tawaraya, Takehito [1 ]
Tsushima, Akira [1 ]
Yoshimura, Shinji [2 ]
机构：
[1] Yokohama Natl Univ, Fac Engn, Yokohama, Kanagawa 2408501, Japan
[2] Natl Inst Nat Sci, Natl Inst Fus Sci, Toki, Gifu 5095292, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 2012年 / 51卷 / 09期
关键词：
PLASMA; SURFACES; SHEATH; FIELD; BEAM;
D O I：
10.1143/JJAP.51.096101
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
With increasing electron temperature (T-e greater than or similar to 20 eV), the effect of secondary electron emission caused by electron impact becomes increasingly significant in probe measurements. Taking into consideration the secondary electron emission coefficient, a method of evaluating probe characteristics is presented and its validity was experimentally investigated using two Langmuir probes of tungsten and molybdenum electrodes with different secondary electron emission coefficients. (C) 2012 The Japan Society of Applied Physics
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页数：5
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