A MEMS Metamaterial for Dynamic Terahertz Wave Switching

被引：0
|
作者：
Han, Zhengli [1 ]
Takahashi, Takuya [1 ]
Toshiyoshi, Hiroshi [1 ]
机构：
[1] Univ Tokyo, Res Ctr Adv Sci & Technol, Meguro Ku, 4-6-1 Komaba, Tokyo 1538904, Japan
来源：
2016 IEEE 16TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO) | 2016年
关键词：
D O I：
暂无
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
A terahertz (THz) dynamic switch with polarization dependence is proposed with MEMS metamaterial method. The split ring resonators (SRRs) are located on a silicon-on-insulator (SOI) wafer, where the buried oxide (BOX) is etched to let the silicon layer together with the SRRs work as an electromechanical shutter to control the incident THz wave propagation. Electrostatic actuation is employed for the shutter operation.
引用
收藏
页码：735 / 738
页数：4
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