Erosion replication of Silicon carbide-based structures

被引:0
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作者
Bazhenov, OG
Karachinov, VA
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PISMA V ZHURNAL TEKHNICHESKOI FIZIKI | 1996年 / 22卷 / 21期
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O59 [应用物理学];
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页码:26 / 29
页数:4
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