Effect of the surface roughness on the detecting capacitance

被引：5
|
作者：
Zhang, Haifeng [1 ,2 ]
Liu, Xiaowei [1 ,2 ]
Li, Hai [2 ]
Chen, Nan [2 ]
Fu, Yibo [2 ]
机构：
[1] Harbin Inst Technol, Minist Educ, Key Lab Microsyst & Microstruct Mfg, Harbin, Peoples R China
[2] Harbin Inst Technol, MEMS Ctr, Harbin, Peoples R China
来源：
MICRO-NANO TECHNOLOGY XIV, PTS 1-4 | 2013年 / 562-565卷
基金：
美国国家科学基金会;
关键词：
surface roughness; capacitance; effect; modeling; MEMS device; INTERCONNECTS; ELECTRODES;
D O I：
10.4028/www.scientific.net/KEM.562-565.1461
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
With the MEMS technology advancement, electronic devices are miniaturized at every development node. The surface roughness is affecting the detecting capacitance of MEMS device because surface to volume ratio is increasing rapidly. A novel model with one rough electrode is investigated in this paper. The impacts of surface roughness on detecting capacitance are analyzed. The image of height percentage is used to describe the surface roughness of electrode sample. The function of the surface roughness is obtained according the method of curve fitting. The effect of surface roughness on the capacitance is calculated. The results demonstrate the capacitance increases with the surface roughness.
引用
收藏
页码：1461 / +
页数：2
相关论文
共 50 条
  • [21] EFFECT OF SURFACE ROUGHNESS IN A CENTRIFUGAL PUMP
    BAIBAKOV, OV
    RUSSIAN ENGINEERING JOURNAL-USSR, 1966, 46 (10): : 27 - &
  • [22] Surface Roughness Effect on Micropillar Cavities
    Xu, Qiang
    Xie, Xiumin
    Shen, Bizhou
    Chen, Jian
    Dai, Qian
    Song, Hai-Zhi
    Zhou, Qiang
    2017 9TH INTERNATIONAL CONFERENCE ON ADVANCED INFOCOMM TECHNOLOGY (ICAIT 2017), 2017, : 30 - 34
  • [23] EFFECT OF TILLAGE ON SURFACE ROUGHNESS.
    Romkens, M.J.M.
    Wang, J.Y.
    Transactions of the American Society of Agricultural Engineers, 1986, 29 (02): : 429 - 433
  • [24] AN ESTIMATE OF THE SURFACE-ROUGHNESS EFFECT
    BORIE, B
    JOURNAL OF APPLIED CRYSTALLOGRAPHY, 1981, 14 (AUG) : 219 - 222
  • [25] Effect of clearcoat thickness on surface roughness
    Tighe, Chris
    Giroux, Jennifer
    Henshaw, Paul
    JCT COATINGSTECH, 2008, 5 (06) : 24 - 28
  • [26] Spin Hall effect by surface roughness
    Zhou, Lingjun
    Grigoryan, Vahram L.
    Maekawa, Sadamichi
    Wang, Xuhui
    Xiao, Jiang
    PHYSICAL REVIEW B, 2015, 91 (04):
  • [27] Effect of noise on surface roughness measurements
    Sahwi, SZ
    Mekawi, AM
    JOINT CONFERENCE - 1996: IEEE INSTRUMENTATION AND MEASUREMENT TECHNOLOGY CONFERENCE & IMEKO TECHNICAL COMMITTEE 7, CONFERENCE PROCEEDINGS, VOLS I AND II: QUALITY MEASUREMENTS: THE INDISPENSABLE BRIDGE BETWEEN THEORY AND REALITY (NO MEASUREMENTS? NO SCIENCE!), 1996, : 232 - 235
  • [28] EFFECT OF TILLAGE ON SURFACE-ROUGHNESS
    ROMKENS, MJM
    WANG, JY
    TRANSACTIONS OF THE ASAE, 1986, 29 (02): : 429 - 433
  • [29] Surface roughness effect on a moving bunch
    Banna, S
    Schächter, L
    PROCEEDINGS OF THE 2003 PARTICLE ACCELERATOR CONFERENCE, VOLS 1-5, 2003, : 1879 - 1881
  • [30] EFFECT OF SURFACE ROUGHNESS ON ROLLING FRICTION
    BIKERMAN, JJ
    JOURNAL OF APPLIED PHYSICS, 1949, 20 (10) : 971 - 975
12345