Modification of the electrode surface in glow discharge plasma with a hollow cathode

被引：3
|
作者：
Marakhtanov, M. K. [1 ]
Riazanov, V. A. [1 ]
Alekseev, D. K. [1 ]
机构：
[1] Bauman Moscow State Tech Univ, 2-nd Baumanskaya 5, Moscow 105005, Russia
来源：
14TH INTERNATIONAL CONFERENCE ON FILMS AND COATINGS | 2019年 / 1281卷
关键词：
D O I：
10.1088/1742-6596/1281/1/012052
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The electric discharge with a hollow cathode has long attracted the attention of researchers, both by its physical properties and technological application. The paper considers the influence of the shape of the treatment surface, which takes the geometry of a hollow cathode, on the parameters of a glow discharge.
引用
收藏
页数：5
相关论文
共 50 条
  • [41] Impact of the electrode structure on post-cathode plasma in the grid electrode DC glow discharge
    Ma, Yiqun
    Lyu, Xingbao
    Yuan, Chengxun
    Avtaeva, Svetlana
    Kudryavtsev, Anatoly
    Zhou, Zhongxiang
    CONTRIBUTIONS TO PLASMA PHYSICS, 2024, 64 (04)
  • [42] Peculiarities of Simulation of the Hollow-Cathode Effect in a Glow-Discharge Electrode System with an Extended Cathode Slit
    Klimov, A. S.
    Bakeev, I. Yu
    Zenin, A. A.
    Oks, E. M.
    Tran, V. T.
    TECHNICAL PHYSICS LETTERS, 2022, 48 (02) : 70 - 73
  • [43] Peculiarities of Simulation of the Hollow-Cathode Effect in a Glow-Discharge Electrode System with an Extended Cathode Slit
    A. S. Klimov
    I. Yu. Bakeev
    A. A. Zenin
    E. M. Oks
    V. T. Tran
    Technical Physics Letters, 2022, 48 : 70 - 73
  • [44] Hollow Cathode Glow Discharge Initiation in a Fore-Vacuum Plasma-Cathode Electron Source
    Bakeev, Ilya Yu.
    Klimov, Aleksandr S. S.
    Oks, Efim M. M.
    Zenin, Aleksey A. A.
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 2022, 50 (12) : 4860 - 4864
  • [45] CVD-processes by hollow cathode glow discharge
    Hellmich, A
    Jung, T
    Kielhorn, A
    Rissland, M
    SURFACE & COATINGS TECHNOLOGY, 1998, 98 (1-3): : 1541 - 1546
  • [46] INFLUENCE OF A HOLLOW CATHODE UPON STRIATION OF A GLOW DISCHARGE
    POPOVICI, C
    CZECHOSLOVAK JOURNAL OF PHYSICS, 1961, 11 (09) : 682 - +
  • [47] Experimental investigations of a cylindrical hollow cathode glow discharge
    Pfau, S
    Kozakov, R
    Otte, M
    Rohmann, J
    INTERNATIONAL CONFERENCE ON PHENOMENA IN IONIZED GASES, VOL III, PROCEEDINGS, 1999, : 33 - 34
  • [48] THEORY OF THE HOLLOW-CATHODE GLOW-DISCHARGE
    HASHIGUCHI, S
    HASIKUNI, M
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1987, 26 (02): : 271 - 280
  • [49] Stabilization superdense glow discharge in devices with hollow cathode
    Bogdanova, NP
    Arefjev, AS
    Yudaev, YA
    IZVESTIYA AKADEMII NAUK SERIYA FIZICHESKAYA, 2000, 64 (07): : 1296 - 1301
  • [50] Ion nitriding in glow discharge with hollow cathode effect
    Budilov, V. V.
    Agzamov, R. D.
    Ramazanov, K. N.
    METAL SCIENCE AND HEAT TREATMENT, 2007, 49 (7-8) : 358 - 361
12345