Modification of the electrode surface in glow discharge plasma with a hollow cathode

被引：3
|
作者：
Marakhtanov, M. K. [1 ]
Riazanov, V. A. [1 ]
Alekseev, D. K. [1 ]
机构：
[1] Bauman Moscow State Tech Univ, 2-nd Baumanskaya 5, Moscow 105005, Russia
来源：
14TH INTERNATIONAL CONFERENCE ON FILMS AND COATINGS | 2019年 / 1281卷
关键词：
D O I：
10.1088/1742-6596/1281/1/012052
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The electric discharge with a hollow cathode has long attracted the attention of researchers, both by its physical properties and technological application. The paper considers the influence of the shape of the treatment surface, which takes the geometry of a hollow cathode, on the parameters of a glow discharge.
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页数：5
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