Microcantilever Arrays With In-Plane Photonic Readout for Biosensing

被引：0

作者：

Nordin, G. P. ^{[1
]}

Kim, S. ^{[1
]}

Hu, W. ^{[1
]}

Anderson, R. R. ^{[1
]}

Noh, J. W. ^{[1
]}

Ness, S. J. ^{[1
]}

Dahlquist, W. C. ^{[1
]}

Richards, D. C. ^{[1
]}

机构：

[1] Brigham Young Univ, Dept Elect & Comp Engn, Provo, UT 84602 USA

来源：

CHEMICAL SENSORS 9 -AND- MEMS/NEMS 9 | 2010年 / 33卷 / 08期

关键词：

TRANSDUCTION;

D O I：

10.1149/1.3484124

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

We review progress toward microcantilever arrays with in-plane photonic readout for biosensing applications. Microcantilever arrays are fabricated on individual silicon-on-insulator (SOI) chips and integrated with two-layer polydimethylsiloxane (PDMS) microfluidics that incorporate fluid channels and valves. Microcantilever functionalization is accomplished by inkjetting appropriate fluids onto one side of each cantilever. Preliminary biosensing results using the streptavidin-biotin model system are discussed.

引用

页码：209 / 219

页数：11

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