Microcantilever Arrays With In-Plane Photonic Readout for Biosensing

被引：0
|
作者：
Nordin, G. P. [1 ]
Kim, S. [1 ]
Hu, W. [1 ]
Anderson, R. R. [1 ]
Noh, J. W. [1 ]
Ness, S. J. [1 ]
Dahlquist, W. C. [1 ]
Richards, D. C. [1 ]
机构：
[1] Brigham Young Univ, Dept Elect & Comp Engn, Provo, UT 84602 USA
来源：
CHEMICAL SENSORS 9 -AND- MEMS/NEMS 9 | 2010年 / 33卷 / 08期
关键词：
TRANSDUCTION;
D O I：
10.1149/1.3484124
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
We review progress toward microcantilever arrays with in-plane photonic readout for biosensing applications. Microcantilever arrays are fabricated on individual silicon-on-insulator (SOI) chips and integrated with two-layer polydimethylsiloxane (PDMS) microfluidics that incorporate fluid channels and valves. Microcantilever functionalization is accomplished by inkjetting appropriate fluids onto one side of each cantilever. Preliminary biosensing results using the streptavidin-biotin model system are discussed.
引用
收藏
页码：209 / 219
页数：11
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