Greater than one billion Q factor for on-chip microresonators

被引:62
|
作者
Wu, Lue [1 ]
Wang, Heming [1 ]
Yang, Qifan [1 ]
Ji, Qing-xin [1 ,2 ]
Shen, Boqiang [1 ]
Bao, Chengying [1 ]
Gao, Maodong [1 ]
Vahala, Kerry [1 ]
机构
[1] CALTECH, TJ Watson Lab Appl Phys, Pasadena, CA 91125 USA
[2] Peking Univ, Sch Phys, Beijing 100871, Peoples R China
关键词
LASER;
D O I
10.1364/OL.394940
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
High optical quality (Q) factors are critically important in optical microcavities, where performance in applications spanning nonlinear optics to cavity quantum electrodynamics is determined. Here, a record Q factor of over 1.1 billion is demonstrated for on-chip optical resonators. Using silica whispering-gallery resonators on silicon, Q-factor data is measured over wavelengths spanning the C/L bands (100 nm) and for a range of resonator sizes and mode families. A record low sub-milliwatt parametric oscillation threshold is also measured in 9 GHz free-spectral-range devices. The results show the potential for thermal silica on silicon as a resonator material. (C) 2020 Optical Society of America
引用
收藏
页码:5129 / 5131
页数:3
相关论文
共 50 条
  • [21] AUTOCORRELATIONS GREATER THAN ONE
    ANDERSON, OD
    AMERICAN STATISTICIAN, 1976, 30 (02): : 102 - 102
  • [22] Design of Novel High-Q-Factor Multipath Stacked On-Chip Spiral Inductors
    Xu, Xiangming
    Li, Pingliang
    Cai, Miao
    Han, Bo
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2012, 59 (08) : 2011 - 2018
  • [23] Microlithography for on-chip high-Q inductors
    IMEC, Kapeldreef 75, 3001 Leuven, Belgium
    Microlithogr World, 2006, 4 (10-11+15):
  • [24] Microlithography for on-chip high-Q inductors
    Soussan, P.
    Carchon, G.
    Swinnen, B.
    Beyne, E.
    MICROLITHOGRAPHY WORLD, 2006, 15 (04): : 10 - +
  • [25] Modal spectroscopy of optoexcited vibrations of a micron-scale on-chip resonator at greater than 1 GHz frequency
    Carmon, Tal
    Vahala, Kerry J.
    PHYSICAL REVIEW LETTERS, 2007, 98 (12)
  • [26] Resonance-enhanced efficient excitation of individual plasmonic nanoparticles using on-chip microresonators
    Chamanzar, Maysamreza
    Yegnanarayanan, Siva
    Adibi, Ali
    2010 23RD ANNUAL MEETING OF THE IEEE PHOTONICS SOCIETY, 2010, : 333 - 334
  • [27] Mode-Locked Ultrashort Pulse Generation from On-Chip Normal Dispersion Microresonators
    Huang, S. -W.
    Zhou, H.
    Yang, J.
    McMillan, J. F.
    Matsko, A.
    Yu, M.
    Kwong, D. -L.
    Maleki, L.
    Wong, C. W.
    PHYSICAL REVIEW LETTERS, 2015, 114 (05)
  • [28] A Fast Tracking and Wide Swing CMOS Peak Detector for On-Chip Q-Factor Measurement
    Zhang, Ming
    Llaser, Nicolas
    IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 2022, 71
  • [29] Maximal Q Factor for an On-Chip, Fuse-Based Trimmable Capacitor (8, 62, 2019)
    Nilsson, Joakim
    Borg, Johan
    Johansson, Jonny
    ELECTRONICS, 2019, 8 (06):
  • [30] Q-Factor Behavior Study of On-Chip Inductors Using Transmission-Line Model
    Huang, C. -H
    Horng, T. -S
    2007 ASIA PACIFIC MICROWAVE CONFERENCE, VOLS 1-5, 2007, : 1911 - 1914