Rapid fabrication of nickel molds for prototyping embossed plastic microfluidic devices

被引:39
|
作者
Novak, Richard [1 ]
Ranu, Navpreet [2 ]
Mathies, Richard A. [1 ,3 ]
机构
[1] Univ Calif Berkeley, Bioengn Program, Berkeley, CA 94720 USA
[2] MIT, Dept Bioengn, Cambridge, MA 02139 USA
[3] Univ Calif Berkeley, Dept Chem, Berkeley, CA 94720 USA
关键词
CHIPS; MICROSTRUCTURES; LAMINATION; POLYMER; EPOXY;
D O I
10.1039/c3lc41362d
中图分类号
Q5 [生物化学];
学科分类号
071010 ; 081704 ;
摘要
The production of hot embossed plastic microfluidic devices is demonstrated in 1-2 h by exploiting vinyl adhesive stickers as masks for electroplating nickel molds. The sticker masks are cut directly from a CAD design using a cutting plotter and transferred to steel wafers for nickel electroplating. The resulting nickel molds are used to hot emboss a variety of plastic substrates, including cyclo-olefin copolymer and THV fluorinated thermoplastic elastomer. Completed devices are formed by bonding a blank sheet to the embossed layer using a solvent-assisted lamination method. For example, a microfluidic valve array or automaton and a droplet generator were fabricated with less than 100 mm x-y plane feature resolution, to within 9% of the target height, and with 90 perpendicular to 11% height uniformity over 5 cm. This approach for mold fabrication, embossing, and bonding reduces fabrication time and cost for research applications by avoiding photoresists, lithography masks, and the cleanroom.
引用
收藏
页码:1468 / 1471
页数:4
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