A compact and fast nano-stylus profiling head for optical instruments

被引：2

作者：

Park, Jae-Hong ^{[2
]}

Jo, Yang-Keun ^{[3
]}

Kim, Jihoe ^{[4
]}

Lee, Dong-Yeon ^{[1
]}

机构：

[1] Yeungnam Univ, Sch Mech Engn, Gyongsan 712749, South Korea

[2] Natl Nanofab Ctr, NEMS & Bio Team, Taejon, South Korea

[3] Go Ryo FND Co LTD, Hwaseong, Gyeonggi, South Korea

[4] Yeungnam Univ, Sch Biotechnol, Gyongsan 712749, South Korea

来源：

JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY | 2012年 / 26卷 / 07期

关键词：

Stylus profiler; Simple linear spring; Solenoid; Force control; FORCE; PROBE;

D O I：

10.1007/s12206-012-5018-0

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

The current study developed a compact and high-speed stylus-profiling head with overall dimensions of 34.3 x 32.5 x 33.7 mm(3). A simple linear flexure leaf spring was used as a precision guide method for the profiling head along a vertical axis and for the assembly of an infrared light-emitting diode. A position-sensitive photo-diode was used for as a simple sensing method. The static and dynamic forces, which can be controlled electronically using a vertical solenoid, were in the range of 10(-2)N to 10(-5) N. Displacement was in the range of 80 nm to 87.2 mu m, making it adequate for the precise surface measurements of hard materials. The sensor resolution was less than 10 nm. The designed profiling head had a moving mass of 1 mg and speed within 100 Hz.

引用

页码：2077 / 2080

页数：4

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