Effect of ferrocene concentration in a working gas mixture on carbon-nanotube growth parameters

被引：4
|
作者：
Basaev, A. S. [1 ]
机构：
[1] Moscow Inst Elect Technol, Sci Mfg Complex Technol Ctr, Zelenograd 124498, Moscow Oblast, Russia
来源：
SEMICONDUCTORS | 2012年 / 46卷 / 13期
关键词：
Ferrocene; Iron Carbide; Cluster Size Distribution; Ferrocene Concentration; Small Diameter Nanotubes;
D O I：
10.1134/S1063782612130039
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
The effect of the ferrocene concentration in a working gas mixture on carbon nanotube (CNT) growth by the CVD method is studied. It is shown that a change in the ferrocene concentration in a gas mixture has a significant effect on CNT growth. A decrease in the ferrocene concentration increases the melt's free energy and leads to the growth of smaller-diameter nanotubes with a lower number of walls, i.e., two or three. An increase in the ferrocene concentration above 1% leads to degradation of the quality of the growing nanotubes. DOI: 10.1134/S1063782612130039
引用
收藏
页码：1613 / 1615
页数：3
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