Process Variability Effect on Soft Error Rate by Characterization of Large Number of Samples

被引:10
|
作者
Gasiot, Gilles [1 ]
Castelnovo, Alexandro [2 ]
Glorieux, Maximilien [1 ]
Abouzeid, Fady [1 ]
Clerc, Sylvain [1 ]
Roche, Philippe [1 ]
机构
[1] STMicroelectronics, F-38926 Crolles, France
[2] STMicroelectronics, I-20864 Agrate Brianza, MB, Italy
关键词
Neutrons; Error analysis; Semiconductor device measurement; Random access memory; Sampling methods; System-on-a-chip; Semiconductor device reliability; soft error rate (SER) experimental characterization; Alpha and neutron; die-to-die variability; hardness assurance; large sampling; process variability;
D O I
10.1109/TNS.2012.2225447
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
For the first time die-to-die soft error rate (SER) variability from process manufacturing is experimentally characterized by irradiating a very large number of samples from a single wafer. Alpha and neutron SER is measured and reported as a function of original location on wafer, test dates and samples capacity. CAD tools are then used to evaluate their capacity to assess die-to-die alpha and neutron SER variability.
引用
收藏
页码:2914 / 2919
页数:6
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