Arbitrary Structures Fabricated by Focused Ion Beam Milling

被引：0

作者：

Jiang, Xiaoxiao ^{[1
]}

Wang, Fengwen ^{[1
]}

Ma, Zhenhe ^{[1
]}

Gu, Qiongchan ^{[1
]}

Lv, Jiangtao ^{[1
]}

Si, Guangyuan ^{[1
]}

机构：

[1] Northeastern Univ, Sch Control Engn, Qinhuangdao 066004, Peoples R China

来源：

NANOTECHNOLOGY AND MATERIAL ENGINEERING RESEARCH | 2013年 / 661卷

关键词：

Nanodevices; arbitrary shapes; focused ion beam; NIOBATE PHOTONIC CRYSTAL; LITHIUM-NIOBATE; WAVE-GUIDES;

D O I：

10.4028/www.scientific.net/AMR.661.66

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Optical components at the nanoscale are crucial for developing photonics and integrated optics. Device with ultrasmall dimensions is of particular importance for nanoscience and electronic technology. Among all the manufacturing tools, the focused ion beam is a critical candidate for machining and processing optical devices at the nanoscale. Here, we experimentally demonstrate the fabrication of nanodevices with arbitrary shapes and different potential applications using focused ion beam techniques.

引用

页码：66 / 69

页数：4

共 50 条

[31] Transport properties of nanoscale Nb and NbN Josephson junctions fabricated by focused-ion-beam milling
Matsuba, Kazuaki
Watanabe, Michio
Tsai, Jaw-Shen
JOURNAL OF APPLIED PHYSICS, 2008, 103 (07)
[32] Investigation of diffractive optical element fabricated on diamond film by use of focused ion beam direct milling
Fu, YQ
Bryan, NKA
OPTICAL ENGINEERING, 2003, 42 (08) : 2214 - 2217
[33] Scanning diamond NV center magnetometer probe fabricated by laser cutting and focused ion beam milling
Kainuma, Yuta
Hayashi, Kunitaka
Tachioka, Chiyaka
Ito, Mayumi
Makino, Toshiharu
Mizuochi, Norikazu
An, Toshu
JOURNAL OF APPLIED PHYSICS, 2021, 130 (24)
[34] Milling of polymeric photonic crystals by focused ion beam
Pialat, E
Trigaud, T
Bernical, V
Moliton, JP
MATERIALS SCIENCE & ENGINEERING C-BIOMIMETIC AND SUPRAMOLECULAR SYSTEMS, 2005, 25 (5-8): : 618 - 624
[35] Redeposition characteristics of focused ion beam milling for nanofabrication
de Winter, D. A. M.
Mulders, J. J. L.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2007, 25 (06): : 2215 - 2218
[36] Focused ion beam milling monitored by an additional electrode
Kunstmann, T.
Utzat, D.
Schlarb, A.
Mazarov, P.
Wucher, A.
Moeller, R.
REVIEW OF SCIENTIFIC INSTRUMENTS, 2006, 77 (08):
[37] Milling a silicon nitride membrane by focused ion beam
Peltonen, Antti
Nguyen, Hung Q.
Muhonen, Juha T.
Pekola, Jukka P.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2016, 34 (06):
[38] Maskless milling of diamond by a focused oxygen ion beam
Martin, Aiden A.
Randolph, Steven
Botman, Aurelien
Toth, Milos
Aharonovich, Igor
SCIENTIFIC REPORTS, 2015, 5
[39] Advanced scanning paths for focused ion beam milling
Yoon, Hae-Sung
Kim, Chung-Soo
Lee, Hyun-Taek
Ahn, Sung-Hoon
VACUUM, 2017, 143 : 40 - 49
[40] Austenite Stability Under Focused Ion Beam Milling
Li, Jian
Liu, Pei
CHARACTERIZATION OF MINERALS, METALS, AND MATERIALS 2020, 2020, : 81 - 88

← 1 2 3 4 5 →