Growth of nanoporous silicon dioxide thin films using porous alumina substrates

被引：8

作者：

Chen, Feng ^{[1
]}

Kitai, Adrian H. ^{[2
,3
]}

机构：

[1] McMaster Univ, Dept Mat Sci & Engn, Hamilton, ON L8S 2N5, Canada

[2] McMaster Univ, Dept Engn Phys, Hamilton, ON L8S 2N5, Canada

[3] McMaster Univ, Dept Mat Sci & Engn, Hamilton, ON L8S 2N5, Canada

来源：

THIN SOLID FILMS | 2008年 / 517卷 / 02期

关键词：

Nanoporous; Thin film; Porous alumina; Self-organized; Sputtering;

D O I：

10.1016/j.tsf.2008.07.009

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this paper, we report a cost-effective and highly reproducible method for the deposition of porous SiO2 thin films by using commercially available porous alumina membranes and radio-frequency magnetron sputtering method. Due to the porous surface of the substrate and its narrow and long channels, the SiO2 thin films partially cover the pores of the alumina membranes and self-organized porous network structures are formed. The pore size depends on the thickness of the films. The morphology of the thin films consists of patterned islands which gradually coalesce together during the growth of the thin films. (C) 2008 Elsevier B.V. All rights reserved.

引用

页码：622 / 625

页数：4

共 50 条

[31] Manipulation of thin silver film growth on weakly interacting silicon dioxide substrates using oxygen as a surfactant
Pliatsikas, Nikolaos
Jamnig, Andreas
Konpan, Martin
Delimitis, Andreas
Abadias, Gregory
Sarakinos, Kostas
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2020, 38 (04):
[32] Growth of lead thin films on silicon and niobium substrates by sputtering technique
Gontad, Francisco
Lorusso, Antonella
Di Giulio, Massimo
Eriksson, Fredrik
Broitman, Esteban
Perrone, Alessio
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2017, 35 (03):
[33] Effects of nickel thin films on nucleation and growth of diamond on silicon substrates
Yang, Qiaoqin
Yang, Songlan
Xiao, Chijin
Hirose, Akira
MATERIALS RESEARCH INNOVATIONS, 2006, 10 (04) : 115 - +
[34] Growth of zno thin films on silicon substrates by atomic layer deposition
Hussin, Rosniza
Hou, Xianghui
Choy, Kwang-Leong
Defect and Diffusion Forum, 2012, 329 : 159 - 164
[35] Effects of nickel thin films on nucleation and growth of diamond on silicon substrates
Department of Mechanical Engineering, University of Saskatchewan, 57 Campus Drive, Saskatoon, Sask. S7N 5A9, Canada
不详
Mater. Res. Innov., 2006, 4 (115-116):
[36] Multifunctional substrates of thin porous alumina for cell biosensors
Chiara Toccafondi
Sanjay Thorat
Rosanna La Rocca
Alice Scarpellini
Marco Salerno
Silvia Dante
Gobind Das
Journal of Materials Science: Materials in Medicine, 2014, 25 : 2411 - 2420
[37] Multifunctional substrates of thin porous alumina for cell biosensors
Toccafondi, Chiara
Thorat, Sanjay
La Rocca, Rosanna
Scarpellini, Alice
Salerno, Marco
Dante, Silvia
Das, Gobind
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN MEDICINE, 2014, 25 (10) : 2411 - 2420
[38] Transient and alternating current conductivity of nanocrystalline porous alumina thin films on silicon, with embedded silicon nanocrystals
Karahaliou, PK
Theodoropoulou, M
Krontiras, CA
Xanthopoulos, N
Georga, SN
Pisanias, MN
Kokonou, M
Nassiopoulou, AG
Travlos, A
JOURNAL OF APPLIED PHYSICS, 2004, 95 (05) : 2776 - 2780
[39] THIN SILICON FILMS ON INSULATING SUBSTRATES
SEITER, H
SIRTL, E
ZAMINER, C
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1965, 112 (11) : C259 - &
[40] On Using Nanoporous Alumina Films as Tribological Coating
Yadav, Arti
Pendyala, Prashant
Bobji, M. S.
PROCEEDINGS OF INTERNATIONAL CONFERENCE ON ADVANCES IN TRIBOLOGY AND ENGINEERING SYSTEMS (ICATES 2013), 2014, : 403 - 409

← 1 2 3 4 5 →