In-line sputter system prepared L10 ordered FePt granular film for HAMR application

被引：0
|
作者：
Hu, J. F. [1 ]
Zhou, T. J. [1 ]
Phyoe, W. L. [1 ]
Cher, K. M. [1 ]
Shi, J. Z. [1 ]
机构：
[1] Data Storage Inst, DSI Bldg,5 Engn Dr 1, Singapore 117608, Singapore
来源：
2012 DIGEST ASIA-PACIFIC MAGNETIC RECORDING CONFERENCE (APMRC) | 2012年
关键词：
HAMR; L1(0) ordered FePt; grain isolation; microstructure control;
D O I：
暂无
中图分类号：
TP301 [理论、方法];
学科分类号：
081202 ;
摘要：
The FePt base composite films for HAMR application have been developed by using the in-line sputter system. The microstructure development of the FePt based HAMR media as a function of film thickness was investigated. It was found that for fixed doping concentration, the grain size slightly increases with the increasing film thickness. The well-isolated FePt grains with main grain size of 6.4 nm +/-0.6 nm were obtained for 6 nm FePt-C film. The developed FePt-C composite film with well-isolated FePt grains has the potential to be used as the recording media for HAMR application.
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页数：2
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