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- [28] ANALYSES ON VARIOUS PARAMETERS FOR THE SIMULATION OF THREE-DIMENSIONAL EARTHQUAKE GROUND MOTIONS. Transactions of the International Conference on Structural Mechanics in Reactor Technology, 1979, K(a).
- [29] Use of rigorous three-dimensional electromagnetic simulation to evaluate the effectiveness of optical proximity correction for nonplanar lithography SEMICONDUCTOR PROCESS AND DEVICE PERFORMANCE MODELLING, 1998, 490 : 173 - 179
- [30] Three-dimensional photolithography simulator including rigorous nonplanar exposure simulation for off-axis illumination OPTICAL MICROLITHOGRAPHY XI, 1998, 3334 : 764 - 776