High-Q Microring Resonators With 2 x 2 Angled Multimode Interference Couplers

被引：4

作者：

Jin, Li ^{[1
]}

Wang, Jianwei ^{[1
]}

Fu, Xin ^{[1
]}

Yang, Bo ^{[1
]}

Shi, Yaocheng ^{[1
]}

Dai, Daoxin ^{[1
]}

机构：

[1] Zhejiang Univ, Ctr Opt & Electromagnet Res, State Key Lab Modern Opt Instrumentat, Zhejiang Prov Key Lab Sensing Technol, Hangzhou 310058, Zhejiang, Peoples R China

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2013年 / 25卷 / 06期

基金：

中国国家自然科学基金;

关键词：

Angled; microring resonator (MRR); multimode interference (MMI) coupler; Q-factor; FABRICATION;

D O I：

10.1109/LPT.2013.2244079

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

High Q-factor microring resonators (MRRs) with 2 x 2 angled multimode interference (MMI) couplers are realized based on SU-8 polymer strip waveguides, which has an SU-8 polymer core, an SiO2 buffer, and an air cladding. The present MRR has a small radius (150 mu m) because of the high-index contrast of the SU-8 optical waveguides. The coupling ratio of the angled MMI couplers is adjusted to achieve a high-loaded Q-factor MRR by modifying the bending angle. When this bending angle is chosen as 3.25 degrees, the Q-factor of the fabricated MRR is about 25 000.

引用

页码：612 / 614

页数：3

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