High-force, cofired multilayer actuators

被引:5
|
作者
Bridger, K [1 ]
Jones, L [1 ]
Poppe, F [1 ]
Brown, S [1 ]
Winzer, S [1 ]
机构
[1] SMS TECHNOL INC,COCKEYSVILLE,MD 21030
关键词
D O I
10.1117/12.239146
中图分类号
V [航空、航天];
学科分类号
08 ; 0825 ;
摘要
引用
收藏
页码:341 / 352
页数:12
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