PICOSECOND TRANSIENT THERMAL IMAGING USING A CCD BASED THERMOREFLECTANCE SYSTEM

被引：0

作者：

Christofferson, James ^{[1
]}

Yazawa, Kazuaki ^{[1
]}

Shakouri, Ali ^{[1
]}

机构：

[1] Univ Calif Santa Cruz, Baskin Sch Engn, Santa Cruz, CA 95064 USA

来源：

PROCEEDINGS OF THE ASME INTERNATIONAL HEAT TRANSFER CONFERENCE - 2010, VOL 4: HEAT TRANSFER MEASUREMENT TECHNIQUES, HEAT TRANSFER EQUIPMENT, THERMOELECTRICS | 2010年

关键词：

TEMPERATURE;

D O I：

暂无

中图分类号：

O414.1 [热力学];

学科分类号：

摘要：

A new Charge Coupled Device (CCD) based, full-field thermoreflectance thermal imaging technique is demonstrated with 800 picoseconds temporal resolution. Transient thermal images of pulsed heating in single interconnect vias of 350nm and 550nm in diameter are shown. The use of pulsed laser diodes and dedicated synchronization circuits can significantly lower the cost and the image acquisition time compared to the scanning pump-probe laser systems. Also the same set up can be used to study transient thermal phenomena in a wide dynamic range from sub nanoseconds to seconds.

引用

页码：93 / 97

页数：5

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