Programmable MZI based on a silicon photonic MEMS-tunable delay line

被引：2

作者：

Hong, Myung S. ^{[1
]}

Lim, Min G. ^{[1
]}

Kim, Dong U. ^{[1
]}

Her, Man J. ^{[1
]}

Choi, Dong J. ^{[1
]}

Jeong, Youngjae ^{[2
]}

Park, Jongwoo ^{[2
]}

Han, Seungjun ^{[2
]}

Chun, Young-Hoon ^{[3
]}

Eom, Seok Chan ^{[3
]}

Oh, Sangyeol ^{[3
]}

Yu, Kyoungsik

Han, Sangyoon ^{[1
]}

机构：

[1] Daegu Gyeongbuk Inst Sci & Technol DGIST, Dept Robot & Mechatron Engn, Daegu 42988, South Korea

[2] Korea Adv Inst Sci & Technol KAIST, Sch Elect Engn, Daejeon 34141, South Korea

[3] LIG Nex1 Cooperat, Gyeonggi Do 16911, South Korea

来源：

OPTICS LETTERS | 2023年 / 48卷 / 21期

关键词：

SWITCHES;

D O I：

10.1364/OL.494414

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We report on a scalable and programmable integrated Mach-Zehnder interferometer (MZI) with a tunable free spectral range (FSR) and extinction ratio (ER). For the tunable path of the MZI, we designed and utilized a tunable delay line having high flexibility based on silicon photonic microelectromechanical systems (MEMS). By utilizing MEMS, the length of the delay line can be geometrically modified. In this way, there is no optical loss penalty other than the waveguide propagation loss as the number of tunable steps increases. Therefore, our device is more scalable in terms of optical loss than the previous approaches based on cascaded MZIs. In addition, the tuning energy required to reconfigure the length is only 8.46 pJ.(c) 2023 Optica Pub-lishing Group

引用

页码：5611 / 5614

页数：4

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