FLEXIBLE TACTILE SENSING ARRAY WITH HIGH SPATIAL DENSITY BASED ON PARYLENE MEMS TECHNIQUE

被引：2

作者：

Zhang, Meixuan ^{[1
]}

Wang, Zetian ^{[1
]}

Xu, Han ^{[2
]}

Chen, Lang ^{[1
]}

Jin, Yufeng ^{[2
,3
]}

Wang, Wei ^{[1
,3
,4
]}

机构：

[1] Peking Univ, Sch Integrated Circuits, Beijing, Peoples R China

[2] Peking Univ, Sch Elect & Comp Engn, Shenzhen Grad Sch, Shenzhen, Peoples R China

[3] Natl Key Lab Micro Nano Fabricat Technol, Beijing, Peoples R China

[4] Beijing Adv Innovat Ctr Integrated Circuits, Beijing, Peoples R China

来源：

2023 IEEE 36TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS | 2023年

基金：

中国国家自然科学基金;

关键词：

Flexible tactile sensing array; Parylene-filled trench; Silicon-based flexible electronics; Parylene MEMS; DESIGN;

D O I：

10.1109/MEMS49605.2023.10052487

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports a novel flexible tactile sensing array with high spatial density, large range and high linearity based on Parylene MEMS technique to mimic the human fingertips' ability of static pressure detection. The proposed array is composed of piezoresistive pressure sensors and Parylene-filled trenches in between for high-resolution sensing and flexible connection separately. Inspired by sensory receptors in human skin, we successfully fabricated a flexible tactile sensing array with high spatial density (similar to 156 cm(-2)), large range (0-2 MPa) and low nonlinearity (0.46% FS (full scale)). The excellent compatibility of Parylene MEMS technique to conventional microfabrication makes it possible for future microsystem to achieve both high performance and good flexibility.

引用

页码：243 / 246

页数：4

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