DEVELOPMENT OF AN ENERGY-AUTONOMOUS PRESSURE MEASUREMENT SYSTEM USING HIGH-TEMPERATURE SHIELDED CAPACITIVE SENSORS

被引：0

作者：

Ghanam, Muhannad ^{[1
]}

Selvaraj, Utham Dev ^{[1
]}

Goldschmidtboeing, Frank ^{[1
]}

Woias, Peter ^{[1
]}

机构：

[1] Univ Freiburg, IMTEK, Lab Design Microsyst, Freiburg, Germany

来源：

2023 22ND INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS, POWERMEMS 2023 | 2023年

关键词：

Energy-autonomous; shielded capacitive pressure; sensor; harsh environments; low power consumption;

D O I：

暂无

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

This paper presents the development of a wireless energy-autonomous pressure measurement system designed for continuous operation in harsh environments. The system incorporates an innovative shielded capacitive pressure sensor that is capable of withstanding extreme temperatures up to 120 degrees C and harsh environments, including exposure to hot water and steam. The sensor has been integrated into the system, which effectively harnesses waste heat to power itself, ensuring uninterrupted and reliable performance. The measurements showcase the sensors' remarkable stability, accuracy, resolution, and low power consumption in practical applications under these challenging conditions.

引用

页码：228 / 231

页数：4

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