PALLADIUM BASED MEMS HYDROGEN SENSORS

被引：3
|
作者：
Hoffmann, Max [1 ]
Wienecke, Marion [1 ]
Lengert, Maren [2 ]
Weidner, Michael H. [2 ]
Heeg, Jan [2 ]
机构：
[1] Hsch Wismar, Inst Oberflachen & Dunnschichttech, Wismar, Germany
[2] Materion GmbH, Stuttgart, Germany
来源：
2023 IEEE 36TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS | 2023年
关键词：
Hydrogen Sensor; Micro-Electro-Mechanical Sensor; Volume Change; Selectivity; DESIGN;
D O I：
10.1109/MEMS49605.2023.10052177
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The paper describes a novel approach of a new sensor based on a micro-electromechanical system (MEMS). These sensors utilise the volume change of Pd due to hydrogenation, thus they switch mechanically. Pd and Pd-alloy ultrathin films have been deposited on the membrane of Si-MEMS chips by magnetron sputtering. Our investigations revealed a reversible switching of MEMS-Pd-sensors without any drift. The sensor shows a fast response for hydrogen concentrations at and below the lower explosion limits up to 100%vol. hydrogen. Besides this, Pd based sensors show low cross sensitivities and particularly no cross sensitivity to methane (CH4) since the switching mechanism is a physical one.
引用
收藏
页码：822 / 825
页数：4
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