PALLADIUM BASED MEMS HYDROGEN SENSORS

被引：3

作者：

Hoffmann, Max ^{[1
]}

Wienecke, Marion ^{[1
]}

Lengert, Maren ^{[2
]}

Weidner, Michael H. ^{[2
]}

Heeg, Jan ^{[2
]}

机构：

[1] Hsch Wismar, Inst Oberflachen & Dunnschichttech, Wismar, Germany

[2] Materion GmbH, Stuttgart, Germany

来源：

2023 IEEE 36TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS | 2023年

关键词：

Hydrogen Sensor; Micro-Electro-Mechanical Sensor; Volume Change; Selectivity; DESIGN;

D O I：

10.1109/MEMS49605.2023.10052177

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The paper describes a novel approach of a new sensor based on a micro-electromechanical system (MEMS). These sensors utilise the volume change of Pd due to hydrogenation, thus they switch mechanically. Pd and Pd-alloy ultrathin films have been deposited on the membrane of Si-MEMS chips by magnetron sputtering. Our investigations revealed a reversible switching of MEMS-Pd-sensors without any drift. The sensor shows a fast response for hydrogen concentrations at and below the lower explosion limits up to 100%vol. hydrogen. Besides this, Pd based sensors show low cross sensitivities and particularly no cross sensitivity to methane (CH4) since the switching mechanism is a physical one.

引用

页码：822 / 825

页数：4

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