Femtosecond Laser Fabrication of Refractive/Diffractive Micro-Optical Components on Hard Brittle Materials

被引:15
|
作者
Tan, Jia-Wei [1 ,2 ]
Wang, Gong [1 ,2 ]
Li, Yunfei [1 ,2 ]
Yu, Yu [1 ,2 ]
Chen, Qi-Dai [3 ]
机构
[1] Hebei Univ Technol, Ctr Adv Laser Technol, Tianjin 300401, Peoples R China
[2] Hebei Key Lab Adv Laser Technol & Equipment, Tianjin 300401, Peoples R China
[3] Jilin Univ, Coll Elect Sci & Engn, State Key Lab Integrated Optoelect, Changchun 130012, Peoples R China
基金
中国国家自然科学基金;
关键词
hard brittle materials; femtosecond laser processing; micro-optical components; FRESNEL ZONE-PLATE; PLASMA-ASSISTED ABLATION; ARTIFICIAL COMPOUND EYE; SINGLE-CRYSTAL DIAMOND; X-RAY MICROSCOPY; SILICA GLASS; PHOTOSENSITIVE GLASS; NUMERICAL APERTURE; DAMMANN GRATINGS; IMAGING-SYSTEM;
D O I
10.1002/lpor.202200692
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Micro-optical components exhibit significant potential applications in various fields such as imaging, optical fiber communication, and aerospace owing to their small size, light weight, and flexible design. It is imperative to fabricate micro-optical components on hard brittle materials to improve stability and broaden the optical transmission range. Therefore, femtosecond laser processing technology is demonstrated to be an efficient processing strategy for preparing refractive/diffractive micro-optical components on hard brittle materials compared to other established micromachining techniques. This study reviews recent advances in refractive/diffractive micro-optical components using femtosecond laser processing technologies. The applications of refractive/diffractive micro-optical components with high accuracy, efficiency, and quality in the fields of imaging, sensing, display, and integration are also summarized. Moreover, the challenges of femtosecond laser processing technologies and the outlook of micro-optical components are highlighted.
引用
收藏
页数:19
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