Recent Development for Ultra-Precision Macro-Micro Dual-Drive System: A Review

被引：9

作者：

Yang, Manzhi ^{[1
]}

Gui, Haochen ^{[1
]}

Zhang, Chuanwei ^{[1
]}

Zhao, Shuanfeng ^{[1
]}

Han, Feiyan ^{[1
]}

Dang, Meng ^{[1
]}

Zhang, Bin ^{[1
]}

机构：

[1] Xian Univ Sci & Technol, Coll Mech Engn, 58 Yanta Middle Rd, Xian 710054, Peoples R China

来源：

MACHINES | 2023年 / 11卷 / 01期

基金：

中国国家自然科学基金;

关键词：

ultra-precision; macro-drive system; micro-drive system; macro-micro dual-drive technology; MOTION PLATFORM; SURFACE GENERATION; PARALLEL MECHANISM; STAGE DRIVEN; LONG-RANGE; DESIGN; FABRICATION; MOTOR; PERFORMANCE; SPEED;

D O I：

10.3390/machines11010096

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Macro-micro dual-drive technology uses a micro-drive system to compensate for motion errors of a macro-drive system, solving the contradiction between large travel and high-precision motion. Additionally, it has a wide range of applications in the ultra-precision field. Therefore, it is necessary to analyze and research the ultra-precision macro-micro dual-drive system. Firstly, this paper analyzes the history of ultra-precision technology development and summarizes the research status of ultra-precision technology processing and application. Secondly, the micro-drive mechanism design and macro-micro-drive mode of macro-micro dual-drive technology, which can solve the contradiction of large stroke and high precision, are reviewed, and the application of macro-micro dual-drive technology in an ultra-precision system is summarized. Finally, the challenges and development trends of the ultra-precision macro-micro dual-drive system are analyzed. The research in this paper will play an important role in promoting the development of the ultra-precision system and macro-micro dual-drive technology.

引用

页数：19

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