论文数: 0 引用数: 0
h-index: 0
机构:
HSG IMIT, Inst Mikro & Informationstechn, D-79110 Freiberg 79110, Germany
Tech Univ Bergakad Freiberg, IMTEK, Dept Microsyst Engn, Lab MEMS Applicat, D-79110 Freiberg, Germany HSG IMIT, Inst Mikro & Informationstechn, D-79110 Freiberg 79110, Germany