Low-loss operation of silicon-on-insulator integrated components at 2.6-2.7 μm

被引:1
|
作者
Tuorila, Heidi [1 ]
Viheriala, Jukka [1 ]
Cherci, Matteo [2 ]
Harjanne, Mikko [2 ]
Marin, Yisbel
Ojanen, Samu-Pekka [1 ]
Karioja, Pentti [3 ]
Guina, Mircea [1 ]
机构
[1] Tampere Univ, Optoelect Res Ctr, Phys Unit, Tampere 33101, Finland
[2] VTT Tech Res Ctr Finland, Espoo 02044, Finland
[3] VTT Tech Res Ctr Finland, Oulu 90571, Finland
基金
欧盟地平线“2020”; 芬兰科学院;
关键词
WAVE-GUIDE; PHOTONICS; ROUGHNESS; SIZE;
D O I
10.1364/OE.497645
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Development of mid-infrared photonics is gaining attention, driven by a multitude of sensing applications requiring increasingly compact and cost-effective photonics systems. To this end, low-loss operation of mu m-scale silicon-on-insulator photonic integration elements is demonstrated for the 2.6-2.7 mu m wavelength region. The platform utilizes the 3 mu m thick silicon core layer technology enabling demonstration of low-loss and low birefringence waveguides. Measurements of record low single mode waveguide propagation losses of 0.56 +/- 0.09 dB/cm and bend losses <0.08 dB for various miniaturized bend geometries are presented and validated by simulation. Furthermore, a wavelength filter based on echelle grating that allows to select several operating channels within the 2.64-2.7 <mu>m band, with a linewidth of similar to 1.56 nm for each channel is presented.
引用
收藏
页码:39039 / 39048
页数:10
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