Highly transparent and low-voltage-driven soft actuators fabricated by laser digital patterning

被引:6
|
作者
Nam, Vu Binh [1 ]
Lee, Daeho [1 ]
机构
[1] Gachon Univ, Dept Mech Engn, Laser & Thermal Engn Lab, 1342 Seongnamdaero, Seongnam 13120, Gyeonggi, South Korea
来源
OPTICS AND LASER TECHNOLOGY | 2024年 / 168卷
基金
新加坡国家研究基金会;
关键词
Laser digital patterning; Ni electrodes; NiO( x )nanoparticles; Reductive sintering; Transparent actuator; Soft actuator; ALIGNED CARBON NANOTUBE; COPPER ELECTRODE; NANOPARTICLES; TEMPERATURE; PERFORMANCE; NONVACUUM; CONDUCTOR; ULTRATHIN; HEATER; LAYER;
D O I
10.1016/j.optlastec.2023.109853
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Laser digital patterning process (LDP) is applied to fabricate highly transparent and low-voltage-driven soft actuators comprising polydimethylsiloxane (PDMS)-Ni electrodes-colorless polyimide (cPI) layers. A highly transparent (transmittance of 80.5% at 550 nm) and a low sheet resistance (15 O sq(-1)) Ni-based actuator is fabricated via laser-induced reductive sintering of a NiOx nanoparticle thin film without employing any vacuum or high-temperature process. Owning to the high conductivity and mechanical stability of the Ni electrodes on cPI, as well as the large difference in the thermal expansion coefficients of cPI and PDMS, the transparent actuator achieves a remarkably large curvature of 1.85 cm(-1 )at a low applied voltage of 17 V and maintains the bending curvature without noticeable changes for 1000 cycles. Different from the conventional actuators, controlling the conductivity of the Ni electrode patterns by simply adjusting the laser parameter during the LDP process allows transparent actuators with the same shape to drive different motions. We also demonstrate that transparent actuators with different shapes can be easily fabricated only by altering the computer-aided design data. Finally, a gripper and a hand-shaped actuator are exemplified as practical applications of the transparent soft actuators.
引用
收藏
页数:10
相关论文
共 50 条
  • [21] Low-Voltage-Driven Sustainable Weightlifting Actuator Based on Polymer-Nanotube Composite
    Hu, Ying
    Wang, Guangfeng
    Tao, Xiaoming
    Chen, Wei
    MACROMOLECULAR CHEMISTRY AND PHYSICS, 2011, 212 (15) : 1671 - 1676
  • [22] METHOD USING OPTICAL POLARIZATION FOR ACHIEVING LOW-VOLTAGE-DRIVEN FERROELECTRIC MEMORY DEVICES
    Ginya, Makoto
    Mizutani, Yasuhiro
    Iwata, Tetsuo
    Otani, Yukitoshi
    INTERNATIONAL JOURNAL OF OPTOMECHATRONICS, 2013, 7 (04) : 253 - 262
  • [23] A microsystem of low-voltage-driven electrophoresis on microchip with array electrode pairs for the separation of amino acids
    Yi Xu
    Xiaoguo Hu
    Jing Liang
    Jianxin Sun
    Wenwen Gu
    Tianming Zhao
    Zhiyu Wen
    Analytical and Bioanalytical Chemistry, 2009, 394 : 1947 - 1953
  • [24] GREEN ELECTROLUMINESCENCE IN LOW-VOLTAGE-DRIVEN METAL-INSULATOR-SEMICONDUCTOR STRUCTURE DIVICES.
    Ohwaki, Junichi
    Kozawaguchi, Haruki
    Tsujiyama, Bunjiro
    1600, (22):
  • [25] Low-Voltage-Driven Flexible InGaZnO Thin-Film Transistor With Small Subthreshold Swing
    Su, Nai-Chao
    Wang, Shui-Jinn
    Huang, Chin-Chuan
    Chen, Yu-Han
    Huang, Hao-Yuan
    Chiang, Chen-Kuo
    Chin, Albert
    IEEE ELECTRON DEVICE LETTERS, 2010, 31 (07) : 680 - 682
  • [26] Low-voltage-driven thin film PZT stacked actuator for RF-MEMS switches
    Moriyama, Masaaki
    Kawai, Yusuke
    Tanaka, Shuji
    Esashi, Masayoshi
    IEEJ Transactions on Sensors and Micromachines, 2012, 132 (09) : 282 - 287
  • [27] A microsystem of low-voltage-driven electrophoresis on microchip with array electrode pairs for the separation of amino acids
    Xu, Yi
    Hu, Xiaoguo
    Liang, Jing
    Sun, Jianxin
    Gu, Wenwen
    Zhao, Tianming
    Wen, Zhiyu
    ANALYTICAL AND BIOANALYTICAL CHEMISTRY, 2009, 394 (07) : 1947 - 1953
  • [28] Ultrathin Al1-xScxN for Low-Voltage-Driven Ferroelectric-Based Devices
    Schoenweger, Georg
    Islam, Md Redwanul
    Wolff, Niklas
    Petraru, Adrian
    Kienle, Lorenz
    Kohlstedt, Hermann
    Fichtner, Simon
    PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS, 2023, 17 (01):
  • [29] Tuning peripheral group density in ternary phosphine oxide hosts for low-voltage-driven yellow PhOLEDs
    Li, Jing
    Zhang, Zhensong
    Han, Chunmiao
    Ding, Dongxue
    Zhao, Yi
    Huang, Wei
    Xu, Hui
    JOURNAL OF MATERIALS CHEMISTRY C, 2015, 3 (26) : 6709 - 6716
  • [30] Low-voltage-driven smart glass based on micro-patterned liquid crystal Fresnel lenses
    Wang, Xiao-Qian
    Tam, Alwin Ming-Wai
    Jia, Shu-Zhen
    Zhang, Qi
    Chen, Xiang-Yu
    Xiong, Ying-Fan
    Zhang, Qian
    Liu, Zhen
    Chigrinov, Vladimir G.
    Kwok, Hoi-Sing
    Shen, Dong
    APPLIED OPTICS, 2019, 58 (04) : 1146 - 1151