Structure of V-defects in long wavelength GaN-based light emitting diodes

被引:16
|
作者
Wu, Feng [1 ]
Ewing, Jacob [1 ]
Lynsky, Cheyenne [1 ]
Iza, Michael [1 ]
Nakamura, Shuji [1 ]
DenBaars, Steven P. [1 ,2 ]
Speck, James S. [1 ]
机构
[1] Univ Calif Santa Barbara, Mat Dept, Santa Barbara, CA 93106 USA
[2] Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
基金
美国国家科学基金会;
关键词
QUANTUM EFFICIENCY; EMISSION; LEDS;
D O I
10.1063/5.0135278
中图分类号
O59 [应用物理学];
学科分类号
摘要
The V-defect is a naturally occurring inverted hexagonal pyramid structure that has been studied in GaN and InGaN growth since the 1990s. Strategic use of V-defects in pre-quantum well superlattices or equivalent preparation layers has enabled record breaking efficiencies for green, yellow, and red InGaN light emitting diodes (LEDs) utilizing lateral injection of holes through the semi-polar sidewalls of the V-defects. In this article, we use advanced characterization techniques such as scattering contrast transmission electron microscopy, high angle annular dark field scanning transmission electron microscopy, x-ray fluorescence maps, and atom probe tomography to study the active region compositions, V-defect formation, and V-defect structure in green and red LEDs grown on (0001) patterned sapphire and (111) Si substrates. We identify two distinct types of V-defects. The "large" V-defects are those that form in the pre-well superlattice and promote hole injection, usually nucleating on mixed (Burgers vector b = +/- a +/- c) character threading dislocations. In addition, "small" V-defects often form in the multi-quantum well region and are believed to be deleterious to high-efficiency LEDs by providing non-radiative pathways. The small V-defects are often associated with basal plane stacking faults or stacking fault boxes. Furthermore, we show through scattering contrast transmission electron microscopy that during V-defect filling, the threading dislocation, which runs up the center of the V-defect, will "bend " onto one of the six { 10 (1) over bar1 } semi-polar planes. This result is essential to understanding non-radiative recombination in V-defect engineered LEDs.
引用
收藏
页数:13
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