Structural transitions on Si(111) surface during Sn adsorption, electromigration, and desorption studied by in situ UHV REM

被引:2
|
作者
Petrov, A. S. [1 ]
Rogilo, D. I. [1 ]
Zhachuk, R. A. [1 ]
Vergules, A. I. [1 ,2 ]
Sheglov, D. V. [1 ]
Latyshev, A. V. [1 ,2 ]
机构
[1] RAS, Rzhanov Inst Semicond Phys, SB, Acad Lavrentev Ave 13, Novosibirsk 630090, Russia
[2] Novosibirsk State Univ, Pirogov Str 2, Novosibirsk 630090, Russia
基金
俄罗斯科学基金会;
关键词
Silicon; Tin; Surface; Structural transitions; Electromigration; Desorption; ION-SCATTERING SPECTROMETRY; ISLAND NUCLEATION; EPITAXIAL-GROWTH; ATOMIC-STRUCTURE; EFFECTIVE CHARGE; SILICON SURFACE; TIN; MICROSCOPY; PB; RECONSTRUCTIONS;
D O I
10.1016/j.apsusc.2022.155367
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Using in situ ultrahigh vacuum reflection electron microscopy, we have studied structural transitions on the Si (1 1 1) surface induced by Sn deposition up to 2 ML coverage (1 ML = 7.8 center dot 10(14) cm(-2)) and by Sn desorption at substrate temperatures T = 200-860 degrees C. We have shown that Si-Sn intermixing in the adsorption layer during Sn deposition onto the Si(1 1 1)-(7 x 7) surface at T > 650 degrees C leads to the shift of the monatomic steps in the step-up direction, and there is formed a mosaic (root 3x root 3)-Sn phase. The electromigration of Sn adatoms induced by DC resistive heating has been shown to redistribute adsorbed Sn layer and to cause local (root 3x root 3)-Sn double left right arrow "1 x 1"-Sn structural transitions on the surface. We have estimated the lower bound of the Sn adatom positive effective charge on the Si(1 1 1) surface q(eff)(Sn) >= 0.001 center dot e. During AC annealing, the rate of desorption-induced "1 x 1"-Sn domain area shrinkage has been measured as a function of substrate temperature, and the activation energy of Sn adatom desorption has been estimated to be 2.5 +/- 0.1 eV.
引用
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页数:13
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