The effects of annealing in oxygen atmosphere of beta-Ga2O3 epilayers were investigated by X-ray photoelectron spectroscopy, photoluminescence and Fourier-transform infrared spectroscopy. The increasing proportions of Ga3+ and O-L (lattice oxygen) signifies the reduction of V-O as the annealing temperature rising. The variations of the photoluminescence emissions demonstrate the improvement of the crystal quality and reduction of V-O(1), V-O(2) and V-Ga. V-O and V-Ga are filled with oxygen atoms and gallium atoms after annealing, mainly attributed to the bonds con-structions of Ga (1)-O (1) and Ga (1)-O (2) in GaO4 tetrahedra. These results offer detailed in-formation and guidelines for removing intrinsic point defects in beta-Ga2O3.
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Washington State Univ, Inst Mat Res, Pullman, WA 99164 USA
Washington State Univ, Mat Sci & Engn Program, Pullman, WA 99164 USAWashington State Univ, Inst Mat Res, Pullman, WA 99164 USA
Jesenovec, Jani
Weber, Marc H.
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Washington State Univ, Inst Mat Res, Pullman, WA 99164 USA
Washington State Univ, Dept Phys & Astron, Pullman, WA 99164 USAWashington State Univ, Inst Mat Res, Pullman, WA 99164 USA
Weber, Marc H.
Pansegrau, Christopher
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Washington State Univ, Dept Phys & Astron, Pullman, WA 99164 USAWashington State Univ, Inst Mat Res, Pullman, WA 99164 USA
Pansegrau, Christopher
McCluskey, Matthew D.
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Washington State Univ, Inst Mat Res, Pullman, WA 99164 USA
Washington State Univ, Dept Phys & Astron, Pullman, WA 99164 USAWashington State Univ, Inst Mat Res, Pullman, WA 99164 USA
McCluskey, Matthew D.
Lynn, Kelvin G.
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Washington State Univ, Inst Mat Res, Pullman, WA 99164 USA
Washington State Univ, Dept Phys & Astron, Pullman, WA 99164 USAWashington State Univ, Inst Mat Res, Pullman, WA 99164 USA
Lynn, Kelvin G.
McCloy, John S.
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Washington State Univ, Inst Mat Res, Pullman, WA 99164 USA
Washington State Univ, Mat Sci & Engn Program, Pullman, WA 99164 USAWashington State Univ, Inst Mat Res, Pullman, WA 99164 USA
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Univ Washington UW, Dept Phys, Seattle, WA 98195 USA
UW, Ctr Nanotechnol, Seattle, WA 98195 USAUniv Washington UW, Dept Phys, Seattle, WA 98195 USA
Lovejoy, T. C.
Chen, Renyu
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UW, Ctr Nanotechnol, Seattle, WA 98195 USA
UW, Dept Elect Engn, Seattle, WA 98195 USAUniv Washington UW, Dept Phys, Seattle, WA 98195 USA
Chen, Renyu
Zheng, X.
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UW, Ctr Nanotechnol, Seattle, WA 98195 USA
UW, Dept Mat Sci & Engn, Seattle, WA 98195 USAUniv Washington UW, Dept Phys, Seattle, WA 98195 USA
Zheng, X.
Villora, E. G.
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Natl Inst Mat Sci, Tsukuba, Ibaraki 3050044, JapanUniv Washington UW, Dept Phys, Seattle, WA 98195 USA
Villora, E. G.
Shimamura, K.
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Natl Inst Mat Sci, Tsukuba, Ibaraki 3050044, JapanUniv Washington UW, Dept Phys, Seattle, WA 98195 USA
Shimamura, K.
Yoshikawa, H.
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Natl Inst Mat Sci, NIMS Beamline Stn SPring 8, Mikazuki, Hyogo 6795148, JapanUniv Washington UW, Dept Phys, Seattle, WA 98195 USA
Yoshikawa, H.
Yamashita, Y.
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Natl Inst Mat Sci, NIMS Beamline Stn SPring 8, Mikazuki, Hyogo 6795148, JapanUniv Washington UW, Dept Phys, Seattle, WA 98195 USA
Yamashita, Y.
Ueda, S.
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Natl Inst Mat Sci, NIMS Beamline Stn SPring 8, Mikazuki, Hyogo 6795148, JapanUniv Washington UW, Dept Phys, Seattle, WA 98195 USA
Ueda, S.
Kobayashi, K.
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Natl Inst Mat Sci, NIMS Beamline Stn SPring 8, Mikazuki, Hyogo 6795148, JapanUniv Washington UW, Dept Phys, Seattle, WA 98195 USA
Kobayashi, K.
Dunham, S. T.
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UW, Ctr Nanotechnol, Seattle, WA 98195 USA
UW, Dept Elect Engn, Seattle, WA 98195 USAUniv Washington UW, Dept Phys, Seattle, WA 98195 USA
Dunham, S. T.
Ohuchi, F. S.
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UW, Ctr Nanotechnol, Seattle, WA 98195 USA
UW, Dept Mat Sci & Engn, Seattle, WA 98195 USAUniv Washington UW, Dept Phys, Seattle, WA 98195 USA
Ohuchi, F. S.
Olmstead, M. A.
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Univ Washington UW, Dept Phys, Seattle, WA 98195 USA
UW, Ctr Nanotechnol, Seattle, WA 98195 USAUniv Washington UW, Dept Phys, Seattle, WA 98195 USA
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Mat & Mfg Directorate, Air Force Res Lab, Wright Patterson AFB, OH 45433 USA
Azimuth Corp, Beavercreek, OH 45324 USAMat & Mfg Directorate, Air Force Res Lab, Wright Patterson AFB, OH 45433 USA
V. Li, Jian
Hendricks, Jessica
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Mat & Mfg Directorate, Air Force Res Lab, Wright Patterson AFB, OH 45433 USA
UES Corp, Beavercreek, OH 45432 USAMat & Mfg Directorate, Air Force Res Lab, Wright Patterson AFB, OH 45433 USA
Hendricks, Jessica
Charnas, Adam
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Mat & Mfg Directorate, Air Force Res Lab, Wright Patterson AFB, OH 45433 USAMat & Mfg Directorate, Air Force Res Lab, Wright Patterson AFB, OH 45433 USA
Charnas, Adam
Noesges, Brenton A.
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Mat & Mfg Directorate, Air Force Res Lab, Wright Patterson AFB, OH 45433 USA
Azimuth Corp, Beavercreek, OH 45324 USAMat & Mfg Directorate, Air Force Res Lab, Wright Patterson AFB, OH 45433 USA
Noesges, Brenton A.
Neal, Adam T.
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Mat & Mfg Directorate, Air Force Res Lab, Wright Patterson AFB, OH 45433 USAMat & Mfg Directorate, Air Force Res Lab, Wright Patterson AFB, OH 45433 USA
Neal, Adam T.
Asel, Thaddeus J.
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Mat & Mfg Directorate, Air Force Res Lab, Wright Patterson AFB, OH 45433 USAMat & Mfg Directorate, Air Force Res Lab, Wright Patterson AFB, OH 45433 USA
Asel, Thaddeus J.
Kim, Yunjo
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Mat & Mfg Directorate, Air Force Res Lab, Wright Patterson AFB, OH 45433 USAMat & Mfg Directorate, Air Force Res Lab, Wright Patterson AFB, OH 45433 USA
Kim, Yunjo
Mou, Shin
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Mat & Mfg Directorate, Air Force Res Lab, Wright Patterson AFB, OH 45433 USAMat & Mfg Directorate, Air Force Res Lab, Wright Patterson AFB, OH 45433 USA