An ultra-compact metasurface-based chromatic confocal sensor

被引：7
|
作者：
Chan, J. H. T. [1 ]
Tang, D. [1 ]
Williamson, J. [1 ]
Martin, H. [1 ]
Henning, A. J. [1 ]
Jiang, X. [1 ]
机构：
[1] Univ Huddersfield, Ctr Precis Technol, Huddersfield HD1 3DH, England
来源：
CIRP ANNALS-MANUFACTURING TECHNOLOGY | 2023年 / 72卷 / 01期
基金：
英国工程与自然科学研究理事会;
关键词：
Optical; Metrology; Metasurface;
D O I：
10.1016/j.cirp.2023.04.002
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Metasurfaces are planar optical elements that provide much greater freedom in manipulating light than conventional optics. This article explores the potential for miniaturised metasurface-based optical sensors. We consider the realisation of a chromatic confocal sensor for position measurement, where a conventional hyperchromatic lens is replaced by a metasurface. The design and fabrication process for a metasurface based on truncated-wave guide type meta-atoms is described. Experimental evaluation of the sensor performance confirms the potential for metasurface-based optical sensors to form the basis of a new generation of miniature, lightweight, low-cost optical sensors to support the data-driven manufacturing technologies of the future.& COPY; 2023 The Authors. Published by Elsevier Ltd on behalf of CIRP. This is an open access article under the CC BY license (http://creativecommons.org/licenses/by/4.0/)
引用
收藏
页码：465 / 468
页数：4
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