Equipment for in situ measurement of machining defects of large aperture optical elements

被引：1
|
作者：
Tie, Guipeng [1 ]
Zhou, Haifeng [2 ]
Shi, Feng [1 ]
Chen, Jian [2 ]
Qiao, Shuo [1 ]
Tian, Ye [1 ]
Song, Ci [1 ]
机构：
[1] Natl Univ Def Technol, Sch Intelligent Sci, Changsha, Peoples R China
[2] ZC Optoelect Technol LTD, Hefei, Anhui, Peoples R China
来源：
INTERNATIONAL JOURNAL OF APPLIED GLASS SCIENCE | 2023年 / 14卷 / 01期
基金：
国家重点研发计划; 中国国家自然科学基金;
关键词：
defect; in situ measurement; optical elements;
D O I：
10.1111/ijag.16593
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
A set of in situ measurement equipment of large aperture strong light element based on the principle of laser scattering is established. The size and distribution of defects (damage points) can be judged by the laser scattering signal. The maximum scanning range is 700 mm*1000 mm. The type and size of defects are directly obtained by scanning the quartz sample with a diameter of 100 mm. The types of defects are pitting and scratches, and the width of the scratches and the diameter of the pitting are mostly in the range of 0-10 mu m. The processing time could reach 31.06s. The device can realize the on-line in situ measurement of large aperture optical elements, and has the advantages of fast response speed and high measurement accuracy.
引用
收藏
页码：3 / 6
页数：4
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