Equipment for in situ measurement of machining defects of large aperture optical elements

被引：1
|
作者：
Tie, Guipeng [1 ]
Zhou, Haifeng [2 ]
Shi, Feng [1 ]
Chen, Jian [2 ]
Qiao, Shuo [1 ]
Tian, Ye [1 ]
Song, Ci [1 ]
机构：
[1] Natl Univ Def Technol, Sch Intelligent Sci, Changsha, Peoples R China
[2] ZC Optoelect Technol LTD, Hefei, Anhui, Peoples R China
来源：
INTERNATIONAL JOURNAL OF APPLIED GLASS SCIENCE | 2023年 / 14卷 / 01期
基金：
国家重点研发计划; 中国国家自然科学基金;
关键词：
defect; in situ measurement; optical elements;
D O I：
10.1111/ijag.16593
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
A set of in situ measurement equipment of large aperture strong light element based on the principle of laser scattering is established. The size and distribution of defects (damage points) can be judged by the laser scattering signal. The maximum scanning range is 700 mm*1000 mm. The type and size of defects are directly obtained by scanning the quartz sample with a diameter of 100 mm. The types of defects are pitting and scratches, and the width of the scratches and the diameter of the pitting are mostly in the range of 0-10 mu m. The processing time could reach 31.06s. The device can realize the on-line in situ measurement of large aperture optical elements, and has the advantages of fast response speed and high measurement accuracy.
引用
收藏
页码：3 / 6
页数：4
相关论文
共 50 条
  • [1] Digital detection system of surface defects for large aperture optical elements
    Fan, Yong
    Chen, Niannian
    Gao, Lingling
    Jia, Yuan
    Wang, Junbo
    Cheng, Xiaofeng
    Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams, 2009, 21 (07): : 1032 - 1036
  • [2] A Fast Method for Large Aperture Optical Elements Surface Defects Detection
    Yang, Cheng
    Lu, Rong
    Chen, Niannian
    ADVANCES IN MULTIMEDIA, SOFTWARE ENGINEERING AND COMPUTING, VOL 2, 2011, 129 : 175 - 184
  • [3] Research and validation of key measurement technologies of large aperture optical elements
    Guo, Renhui
    Chen, Lei
    Jiang, Chao
    Cao, Hui
    Zhang, Huiqin
    Zhou, Binbin
    Song, Le
    PACIFIC RIM LASER DAMAGE 2015: OPTICAL MATERIALS FOR HIGH-POWER LASERS, 2015, 9532
  • [4] Research on Stitching Algorithm of Large Aperture Optical Elements Piecewise Measurement Data
    Zhang, Dongxu
    Wang, Zhenzhong
    Guo, Yinbiao
    Yang, Feng
    Zhang, Ningning
    Zhang, Yanting
    Ye, Hui
    ADVANCED COMPOSITE MATERIALS, PTS 1-3, 2012, 482-484 : 376 - +
  • [5] Development of Detection Techniques of Surface Defects for Large Aperture Optical Elements Based on Machine Vision
    Tao Xian
    Zhang Zheng-tao
    Zhang Feng
    Shi ya-li
    Xu De
    2014 33RD CHINESE CONTROL CONFERENCE (CCC), 2014, : 2935 - 2940
  • [6] Structrual design of detector for optical elements with large aperture
    Huang B.
    Li X.-L.
    Yang H.-Q.
    Huang, Bin (huangbin@ciomp.ac.cn), 1600, Chinese Academy of Sciences (24): : 259 - 266
  • [7] Magnetorheological processing for large aperture plane optical elements
    Hou J.
    Wang H.-X.
    Chen X.-H.
    Xie R.-Q.
    Deng W.-H.
    Tang C.-X.
    Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 24 (12): : 3054 - 3060
  • [8] Study on machining of large acrylic lens for optical elements
    Katsuta, Tomonori
    Yokomizo, Seiichi
    Sasaki, Makoto
    Progress of Machining Technology, Proceedings, 2006, : 507 - 510
  • [9] In-situ shape measurement technology during large aperture optical planar continuous polishing process
    Xie, Ruiqing
    Liao, Defeng
    Chen, Jian
    Zhao, Shijie
    Chen, Xianhua
    Ji, Baojian
    Wang, Jian
    Xu, Qiao
    YOUNG SCIENTISTS FORUM 2017, 2018, 10710
  • [10] Testing errors and its influence of the large aperture optical elements
    Zhang, R.Z.
    Xu, Q.
    Gu, Y.Y.
    Cai, B.W.
    Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams, 2001, 13 (02): : 133 - 136
12345