Micro-Optics 3D Printed via Multi-Photon Laser Lithography

被引:91
|
作者
Gonzalez-Hernandez, Diana [1 ]
Varapnickas, Simonas [2 ]
Bertoncini, Andrea [1 ]
Liberale, Carlo [1 ,3 ]
Malinauskas, Mangirdas [2 ]
机构
[1] King Abdullah Univ Sci & Technol KAUST, Biol & Environm Sci & Engn Div, Thuwal 239556900, Saudi Arabia
[2] Vilnius Univ, Phys Fac, Laser Res Ctr, LT-10223 Vilnius, Lithuania
[3] King Abdullah Univ Sci & Technol KAUST, Comp Elect & Math Sci & Engn, Thuwal 239556900, Saudi Arabia
基金
欧盟地平线“2020”;
关键词
fiber-optics; integrated devices; laser 3D printing; micro-optics; nano-photonics; nanotechnology; two-photon polymerization; DIFFRACTIVE OPTICAL-ELEMENTS; INDUCED DAMAGE THRESHOLD; 2-PHOTON POLYMERIZATION; REFRACTIVE-INDEX; PHOTONIC STRUCTURES; FIBER TIP; MICRO; FABRICATION; MICROSTRUCTURES; LIGHT;
D O I
10.1002/adom.202201701
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The field of 3D micro-optics is rapidly expanding, and essential advances in femtosecond laser direct-write 3D multi-photon lithography (MPL, also known as two-photon or multi-photon polymerization) are being made. Micro-optics realized via MPL emerged a decade ago and the field has exploded during the last five years. Impressive findings have revealed its potential for beam shaping, advanced imaging, optical sensing, integrated photonic circuits, and much more. This is supported by a game-changing and increasing industrial interest from key established companies in this field. In this review, the origin and the advancement of micro-optics fabrication with MPL are detailed by describing the chronology, distinguishing discrete application groups, providing generalized technical data on the processes and available materials, and discussing the foreseen near-future advances.
引用
收藏
页数:19
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