Extraction Technique for the Conduction Band Minimum Energy in Amorphous Indium-Gallium-Zinc-Oxide Thin Film Transistors
被引:3
|
作者:
论文数: 引用数:
h-index:
机构:
Kim, Haesung
[1
]
Yoo, Han Bin
论文数: 0引用数: 0
h-index: 0
机构:
Kookmin Univ, Sch Elect Engn, Seoul 02707, South KoreaKookmin Univ, Sch Elect Engn, Seoul 02707, South Korea
Yoo, Han Bin
[1
]
Lee, Heesung
论文数: 0引用数: 0
h-index: 0
机构:
SEC, Memory Business, DRAM PA Team, DRAM Prod & Technol, Pyeongtaek 17786, Gyeonggi, South KoreaKookmin Univ, Sch Elect Engn, Seoul 02707, South Korea
Lee, Heesung
[2
]
Ryu, Ji Hee
论文数: 0引用数: 0
h-index: 0
机构:
Kookmin Univ, Sch Elect Engn, Seoul 02707, South KoreaKookmin Univ, Sch Elect Engn, Seoul 02707, South Korea
Ryu, Ji Hee
[1
]
Park, Ju Young
论文数: 0引用数: 0
h-index: 0
机构:
Kookmin Univ, Sch Elect Engn, Seoul 02707, South KoreaKookmin Univ, Sch Elect Engn, Seoul 02707, South Korea
Park, Ju Young
[1
]
Han, Seung Hyeop
论文数: 0引用数: 0
h-index: 0
机构:
Kookmin Univ, Sch Elect Engn, Seoul 02707, South KoreaKookmin Univ, Sch Elect Engn, Seoul 02707, South Korea
Han, Seung Hyeop
[1
]
Yang, Hyojin
论文数: 0引用数: 0
h-index: 0
机构:
Kookmin Univ, Sch Elect Engn, Seoul 02707, South KoreaKookmin Univ, Sch Elect Engn, Seoul 02707, South Korea
Yang, Hyojin
[1
]
Bae, Jong-Ho
论文数: 0引用数: 0
h-index: 0
机构:
Kookmin Univ, Sch Elect Engn, Seoul 02707, South KoreaKookmin Univ, Sch Elect Engn, Seoul 02707, South Korea
Bae, Jong-Ho
[1
]
Choi, Sung-Jin
论文数: 0引用数: 0
h-index: 0
机构:
Kookmin Univ, Sch Elect Engn, Seoul 02707, South KoreaKookmin Univ, Sch Elect Engn, Seoul 02707, South Korea
Choi, Sung-Jin
[1
]
Kim, Dae Hwan
论文数: 0引用数: 0
h-index: 0
机构:
Kookmin Univ, Sch Elect Engn, Seoul 02707, South KoreaKookmin Univ, Sch Elect Engn, Seoul 02707, South Korea
Kim, Dae Hwan
[1
]
Kim, Dong Myong
论文数: 0引用数: 0
h-index: 0
机构:
Kookmin Univ, Sch Elect Engn, Seoul 02707, South KoreaKookmin Univ, Sch Elect Engn, Seoul 02707, South Korea
Kim, Dong Myong
[1
]
机构:
[1] Kookmin Univ, Sch Elect Engn, Seoul 02707, South Korea
[2] SEC, Memory Business, DRAM PA Team, DRAM Prod & Technol, Pyeongtaek 17786, Gyeonggi, South Korea
Thin film transistors;
Logic gates;
Optimized production technology;
Threshold voltage;
Substrates;
Random access memory;
Indium;
Amorphous oxide semiconductor-based thin film transistors (AOS TFTS);
amorphous indium-gallium-zinc-oxide (a-IGZO)-TFTS;
conduction band minimum energy;
extraction technique;
mobility edge;
SUBGAP DOS;
CAPACITANCE;
STATES;
D O I:
10.1109/TED.2023.3269735
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
The conduction band minimum energy in amorphous oxide semiconductor-based thin film transistors (AOS TFTs) is a key parameter governing the accurate extraction of energy distribution for the subgap density-of states (DOSs) and carrier mobility. We report a technique for extraction of the gate voltage (V-CBM) and corresponding energy (E-F,E-CBM = EC-EREF) for the quasi-Fermi level (E-F) equal to the conduction band minimum (E-C) as V-CBM = V-GS (E-F = E-C) and E-F,E-CBM = E-F (V-GS = V-CBM). In order to confirm this technique through optoelectronic experimental data, amorphous indium-gallium-zinc-oxide (a-IGZO)based thin film transistor was irradiated with various wavelengths and power, and obtained V-CBM = 7.1 V and E-F CBM = 71 meV in the dark state. This technique is expected to be useful in the accurate characterization of the subgap DOS and the effective mobility in AOS TFTs through a simple and effective extraction process.
机构:
Yamagata Research Institute of Technology, 2-2-1, Matsuei, Yamagata, YamagataYamagata Research Institute of Technology, 2-2-1, Matsuei, Yamagata, Yamagata
Iwamatsu S.
Abe Y.
论文数: 0引用数: 0
h-index: 0
机构:
Yamagata Research Institute of Technology, 2-2-1, Matsuei, Yamagata, YamagataYamagata Research Institute of Technology, 2-2-1, Matsuei, Yamagata, Yamagata
Abe Y.
Katoh M.
论文数: 0引用数: 0
h-index: 0
机构:
Yamagata Research Institute of Technology, 2-2-1, Matsuei, Yamagata, YamagataYamagata Research Institute of Technology, 2-2-1, Matsuei, Yamagata, Yamagata
Katoh M.
Takechi K.
论文数: 0引用数: 0
h-index: 0
机构:
Tianma Japan, Ltd., 1-1-2, Kashimada, Saiwai-ku, Kawasaki, KanagawaYamagata Research Institute of Technology, 2-2-1, Matsuei, Yamagata, Yamagata
Takechi K.
Tanabe H.
论文数: 0引用数: 0
h-index: 0
机构:
Tianma Japan, Ltd., 1-1-2, Kashimada, Saiwai-ku, Kawasaki, KanagawaYamagata Research Institute of Technology, 2-2-1, Matsuei, Yamagata, Yamagata
机构:
Kyung Hee Univ, Adv Display Res Ctr, Seoul 130701, South Korea
Kyung Hee Univ, Dept Informat Display, Seoul 130701, South KoreaKyung Hee Univ, Adv Display Res Ctr, Seoul 130701, South Korea
Chowdhury, Md Delwar Hossain
Migliorato, Piero
论文数: 0引用数: 0
h-index: 0
机构:
Kyung Hee Univ, Adv Display Res Ctr, Seoul 130701, South Korea
Kyung Hee Univ, Dept Informat Display, Seoul 130701, South Korea
Univ Cambridge, Dept Engn, Elect Engn Div, Cambridge CB3 0FA, EnglandKyung Hee Univ, Adv Display Res Ctr, Seoul 130701, South Korea
Migliorato, Piero
Jang, Jin
论文数: 0引用数: 0
h-index: 0
机构:
Kyung Hee Univ, Adv Display Res Ctr, Seoul 130701, South Korea
Kyung Hee Univ, Dept Informat Display, Seoul 130701, South KoreaKyung Hee Univ, Adv Display Res Ctr, Seoul 130701, South Korea