SUSPENDED TWO-DIMENSIONAL MATERIAL MEMBRANES FOR SENSOR APPLICATIONS FABRICATED WITH A HIGH-YIELD TRANSFER PROCESS

被引：1

作者：

Lukas, Sebastian ^{[1
]}

Kraiem, Ines ^{[1
,2
]}

Prechtl, Maximilian ^{[3
,4
]}

Hartwig, Oliver ^{[3
,4
]}

Grundmann, Annika ^{[5
]}

Kalisch, Holger ^{[5
]}

Kataria, Satender ^{[1
]}

Heuken, Michael ^{[5
,6
]}

Vescan, Andrei ^{[5
]}

Duesberg, Georg S. ^{[3
,4
]}

Lemme, Max C. ^{[1
,2
]}

机构：

[1] Rhein Westfal TH Aachen, Chair Elect Devices, Otto Blumenthal Str 2, D-52074 Aachen, Germany

[2] AMO GmbH, Adv Microelect Ctr Aachen, Otto Blumenthal Str 25, D-52074 Aachen, Germany

[3] Univ Bundeswehr Munich, Inst Phys, Fac Elect Engn & Informat Technol EIT 2, D-85577 Neubiberg, Germany

[4] Univ Bundeswehr Munich, Ctr Integrated Sensor Syst, D-85577 Neubiberg, Germany

[5] Rhein Westfal TH Aachen, Compound Semicond Technol, Sommerfeldstr 18, D-52074 Aachen, Germany

[6] AIXTRON SE, Dornkaulstr 2, D-52134 Herzogenrath, Germany

来源：

2023 IEEE 36TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS | 2023年

关键词：

suspended 2D materials; graphene; PtSe2; MoS2; transition metal dichalcogenides; membrane-based sensors; GROWTH;

D O I：

10.1109/MEMS49605.2023.10052595

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports a novel dry-transfer method for suspending and patterning two-dimensional (2D) materials across closed (sealed) cavities on a target substrate. The process utilizes handling frames and heat to ensure sufficient adhesion and a multi-layer resist stack to pattern the suspended thin films. The yield of intact suspended monolayer graphene membranes is up to more than 75 %, higher than formerly reported [1]-[3]. The process also demonstrates high yields of intact membranes of double-layer graphene and of two different transition metal dichalcogenides. The process flow can be applied to the fabrication of various sensor applications, such as pressure sensors.

引用

页码：627 / 630

页数：4

共 50 条

[21] Indentation of suspended two-dimensional solids: The signatures of geometrical and material nonlinearity
Chandler, Thomas G. J.
Vella, Dominic
JOURNAL OF THE MECHANICS AND PHYSICS OF SOLIDS, 2020, 144
[22] One-Dimensional and Two-Dimensional Nanomaterials for Sensor Applications
Zhou, Andrew F.
Feng, Peter X.
CRYSTALS, 2024, 14 (07)
[23] Graphene: A two dimensional super material for sensor applications
Goyal, Deepam
Mittal, Sudesh Kumar
Choudhary, Anurag
Dang, Rajeev Kumar
MATERIALS TODAY-PROCEEDINGS, 2021, 43 : 203 - 208
[24] Investigation of sensitivity of two-dimensional integrated magnetic sensor fabricated in sub-micron CMOS process
Kimura T.
Furuya H.
Masuzawa T.
Kyokai Joho Imeji Zasshi/Journal of the Institute of Image Information and Television Engineers, 2011, 65 (03): : 364 - 366
[25] GAAS ICS FABRICATED WITH THE HIGH-PERFORMANCE, HIGH-YIELD MULTIFUNCTION SELF-ALIGNED GATE PROCESS FOR RADAR AND EW APPLICATIONS
BAHL, IJ
WILLEMS, DA
NABER, JF
SINGH, HP
GRIFFIN, EL
POLLMAN, MD
GEISSBERGER, AE
SADLER, RA
IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1990, 38 (09) : 1232 - 1241
[26] Enhancement of ion selectivity and permeability in two-dimensional material membranes
Luo, Jie
Qiao, Risa
Ding, Baofu
MATTER, 2024, 7 (10) : 3351 - 3389
[27] Two-Dimensional Folded Hall Sensor Fabricated in Standard CMOS Technology
Sung, Guo-Ming
Lin, Wen-Sheng
Yu, Chih-Ping
2012 IEEE SENSORS PROCEEDINGS, 2012, : 1767 - 1769
[28] High-yield synthesis of Pt-based two-dimensional nanoplates for methanol electro-oxidation reaction
Chen, Lei
Zhang, Qiao
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2017, 253
[29] HIGH-SPEED GAAS MULTIPLIERS FABRICATED WITH A HIGH-YIELD 0.4-MU-M PROCESS
SADLER, RA
STUDTMANN, GD
SINGH, HP
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1993, 40 (09) : 1578 - 1582
[30] Surface Patterning of Two-Dimensional Nanostructure-Embedded Photothermal Hydrogels for High-Yield Solar Steam Generation
Lu, Yi
Fan, Deqi
Wang, Yida
Xu, Haolan
Lu, Chunhua
Yang, Xiaofei
ACS NANO, 2021, 15 (06) : 10366 - 10376

← 1 2 3 4 5 →