Effects of bias voltage on the microstructure and properties of AlCrN/AlTiN nanoscale multilayer coatings

被引:4
|
作者
Fan, Qixiang [1 ]
Guo, Minglu [1 ]
Wu, Zhenghuan [2 ]
Hao, Xuehui [3 ]
Cao, Fengting [1 ]
Liu, Yanmei [1 ]
Wang, Tiegang [1 ]
机构
[1] Tianjin Univ Technol & Educ, Tianjin Key Lab High Speed Cutting & Precis Machin, Tianjin 300222, Peoples R China
[2] Natl Mold Prod Qual Supervis & Inspection Ctr, Guangdong, Peoples R China
[3] Liaocheng Univ, Sch Mat Sci & Engn, Liaocheng 252059, Peoples R China
基金
中国国家自然科学基金;
关键词
Multilayer coating; Bias voltage; Microstructure; Mechanical property; Tribological property; THERMAL-PROPERTIES; TRIBOLOGICAL PROPERTIES; LAYER ARRANGEMENT; PHASE-TRANSITION; FILMS; BEHAVIOR; MODEL; OPTIMIZATION; ORIENTATION; DEPOSITION;
D O I
10.1016/j.vacuum.2023.112327
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Bias voltage has great influence on the microstructure and properties of multilayer coatings, but it is endowed less attentions compared with modulation periods. In this work, effects of bias voltage ranging from -120 V to -210 V on the microstructure and properties of the AlCrN/AlTiN multilayer coatings are investigated. Results show that the multilayer coatings possess fcc-(Al,Cr,Ti)N singular phase, and grow preferentially along the (111) plane, but the texture coefficient of the (111) plane drops greatly at -210 V. Surface roughness decreases firstly and then increases with the bias voltage. Conversely, the hardness increases gradually to the maximum value 33.0 GPa at -180 V, and then decreases to 26.4 GPa at -210 V caused by the texture variation and coarse structure. The adhesion strength decreases gradually with the bias voltage due to augmented residual stress. The friction coefficient and wear rate drop firstly and then increase at -210 V. Abrasion, oxidation and adhesion wear are primarily responsible for the failure of the coatings at mediate bias voltage, while spallation accelerates the failure of the coatings at -120 V and -210 V caused by their poor microstructure and mechanical property.
引用
收藏
页数:10
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