Editorial for the Special Issue on State-of-the-Art CMOS and MEMS Devices

被引：0

作者：

Chen, Zhiming ^{[1
]}

机构：

[1] Beijing Inst Technol, Sch Integrated Circuits & Elect, Beijing 100081, Peoples R China

来源：

MICROMACHINES | 2024年 / 15卷 / 03期

基金：

中国国家自然科学基金;

关键词：

D O I：

10.3390/mi15030327

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页数：5

共 50 条

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