Air quality monitoring;
indium gallium zinc oxide thin film transistor (IGZO TFT);
Internet of Things (IoT);
nitrogen dioxide (NO2) sensor;
oscillators;
sensing systems;
wireless gas sensors;
HEALTH-CARE;
SENSORS;
IMPROVEMENT;
D O I:
10.1109/JSEN.2023.3281270
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
There is a need for reliable and accurate air quality monitoring systems in order to secure human health from the air pollutants such as nitrogen dioxide (NO2). The development of low-cost and modern technology-compatible sensing systems is essential. In this work, a highly sensitive and selective indium gallium zinc oxide (IGZO) thin film transistor has been used to design an efficient and wireless NO2 sensing system. The sensing system uses the IGZO thin film transistor (TFT) as a current source for the current-starved ring oscillator (CSRO) where exposed NO2 concentration determines the oscillation frequency. The presented NO2 gas sensing system exhibited excellent sensitivity of 5.39 MHz/ppm with the lowest detection limit (LOD) of 50 ppb at room temperature. To the best of the authors' knowledge, the achieved sensitivity is the best-reported performance for frequency-based NO2 sensors. The sinusoidal output of the sensor obviates the need for costly peripheral signal conditioning circuits and allows direct integration with wireless systems. The 13.56 MHz RFID antenna connected to the output of the sensor is used to show wireless sensing compatibility and highlights the excellent candidacy of the proposed work for the growing Internet of Things (IoT) and untethered sensor applications.
机构:
Ritsumeikan Univ, Coll Life Sci, Dept Appl Chem, Kusatsu, Shiga 5258577, JapanRitsumeikan Univ, Coll Life Sci, Dept Appl Chem, Kusatsu, Shiga 5258577, Japan
Meng, Zhicong
Fujii, Aya
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机构:
Ritsumeikan Univ, Coll Life Sci, Dept Appl Chem, Kusatsu, Shiga 5258577, JapanRitsumeikan Univ, Coll Life Sci, Dept Appl Chem, Kusatsu, Shiga 5258577, Japan
Fujii, Aya
Hashishin, Takeshi
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机构:
Kumamoto Univ, Grad Sch Sci & Technol, Chuo Ku, Kumamoto 8608555, JapanRitsumeikan Univ, Coll Life Sci, Dept Appl Chem, Kusatsu, Shiga 5258577, Japan
Hashishin, Takeshi
Wada, Noriyuki
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机构:
Suzuka Coll Shiroko, Natl Inst Technol, Dept Mat Sci & Engn, Suzuka, Mie 5100294, JapanRitsumeikan Univ, Coll Life Sci, Dept Appl Chem, Kusatsu, Shiga 5258577, Japan
Wada, Noriyuki
Sanada, Tomoe
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Ritsumeikan Univ, Coll Life Sci, Dept Appl Chem, Kusatsu, Shiga 5258577, JapanRitsumeikan Univ, Coll Life Sci, Dept Appl Chem, Kusatsu, Shiga 5258577, Japan
Sanada, Tomoe
Tamaki, Jun
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机构:
Ritsumeikan Univ, Coll Life Sci, Dept Appl Chem, Kusatsu, Shiga 5258577, JapanRitsumeikan Univ, Coll Life Sci, Dept Appl Chem, Kusatsu, Shiga 5258577, Japan
Tamaki, Jun
Kojima, Kazuo
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机构:
Ritsumeikan Univ, Coll Life Sci, Dept Appl Chem, Kusatsu, Shiga 5258577, JapanRitsumeikan Univ, Coll Life Sci, Dept Appl Chem, Kusatsu, Shiga 5258577, Japan
Kojima, Kazuo
Haneoka, Hitoshi
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机构:
Osaka Univ, Comprehens Anal Ctr, Inst Sci & Ind Res, Osaka 5670047, JapanRitsumeikan Univ, Coll Life Sci, Dept Appl Chem, Kusatsu, Shiga 5258577, Japan
机构:
Korea Inst Ind Technol KITECH, Nonferrous Mat Grp, 137-41 Gwahakdanji Ro, Gangneung Si 25440, South KoreaKorea Inst Ind Technol KITECH, Nonferrous Mat Grp, 137-41 Gwahakdanji Ro, Gangneung Si 25440, South Korea
Kwon, Yong Jung
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Mirzaei, Ali
Na, Han Gil
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机构:
Hanyang Univ, Div Mat Sci & Engn, Seoul 133791, South KoreaKorea Inst Ind Technol KITECH, Nonferrous Mat Grp, 137-41 Gwahakdanji Ro, Gangneung Si 25440, South Korea
Na, Han Gil
Kang, Sung Yong
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机构:
Hanyang Univ, Div Mat Sci & Engn, Seoul 133791, South KoreaKorea Inst Ind Technol KITECH, Nonferrous Mat Grp, 137-41 Gwahakdanji Ro, Gangneung Si 25440, South Korea
Kang, Sung Yong
Choi, Myung Sik
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Hanyang Univ, Div Mat Sci & Engn, Seoul 133791, South KoreaKorea Inst Ind Technol KITECH, Nonferrous Mat Grp, 137-41 Gwahakdanji Ro, Gangneung Si 25440, South Korea
Choi, Myung Sik
Bang, Jae Hoon
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Hanyang Univ, Div Mat Sci & Engn, Seoul 133791, South KoreaKorea Inst Ind Technol KITECH, Nonferrous Mat Grp, 137-41 Gwahakdanji Ro, Gangneung Si 25440, South Korea
Bang, Jae Hoon
Oum, Wansik
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Hanyang Univ, Div Mat Sci & Engn, Seoul 133791, South KoreaKorea Inst Ind Technol KITECH, Nonferrous Mat Grp, 137-41 Gwahakdanji Ro, Gangneung Si 25440, South Korea
Oum, Wansik
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Kim, Sang Sub
Kim, Hyoun Woo
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机构:
Hanyang Univ, Res Inst Ind Sci, Seoul 133791, South Korea
Hanyang Univ, Div Mat Sci & Engn, Seoul 133791, South KoreaKorea Inst Ind Technol KITECH, Nonferrous Mat Grp, 137-41 Gwahakdanji Ro, Gangneung Si 25440, South Korea