Physical and Mechanical Properties of Multicomponent (Zr plus TiBSiNi)N Coating Fabricated by Plasma-Assisted Vacuum-Arc Deposition

被引：2

作者：

Savostikov, V. M. ^{[1
]}

Leonov, A. A. ^{[1
]}

Denisov, V. V. ^{[1
]}

Denisova, Yu. A. ^{[1
]}

Savchuk, M. V. ^{[1
]}

Skosyrskii, A. B. ^{[1
,2
]}

Shmakov, A. N. ^{[1
,3
]}

机构：

[1] Russian Acad Sci, Siberian Branch, Inst High Current Elect, Tomsk, Russia

[2] Natl Res Tomsk State Univ, Tomsk, Russia

[3] Russian Acad Sci, Siberian Branch, Budker Inst Nucl Phys, Novosibirsk, Russia

来源：

RUSSIAN PHYSICS JOURNAL | 2024年 / 66卷 / 11期

关键词：

vacuum arc deposition; multicomponent coating; beam-plasma formation; gas discharge plasma; microhardness; X-ray diffraction analysis;

D O I：

10.1007/s11182-023-03059-z

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

The paper studies physical and mechanical properties of multicomponent (Zr+TiBSiNi)N coating synthesized by vacuum-arc deposition using the traditional plasma-assisted gas source "PINK" and new beam-plasma formation (BPF) system. It is shown that the coating obtained by using the BPF system, has better properties that the coating obtained by using the traditional plasma-assisted gas source. In the first case, the coating hardness is 47.8 GPA and in the second case, it is 40.9 GPa. The X-ray diffraction analysis shows that along with ZrN and TiN phases, the BPF-synthesized coating consists of the superhard and heat-resistant TiB2 phase. The X-ray diffraction analysis of the phase composition conducted for the in situ synchrotron radiation beam, shows that notable phase transformations start at temperatures higher than 750 degrees C.

引用

页码：1173 / 1179

页数：7

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