[1] Southeast Univ, Sch Integrated Circuits, Minist Educ, Key Lab MEMS, Nanjing 210096, Peoples R China
[2] King Abdullah Univ Sci & Technol KAUST, Clean Combust Res Ctr CCRC, Phys Sci & Engn Div PSE, Thuwal 239556900, Saudi Arabia
[3] Univ Elect Sci & Technol China, Sch Integrated Circuit Sci & Engn, State Key Lab Elect Thin Films & Integrated Device, Chengdu 611731, Peoples R China
[4] Fujian Sci & Technol Innovat Lab Energy Devices Ch, Ningde 352100, Peoples R China